@inproceedings{c46b4d1093fd4c3993f37c8e4e211e2f,
title = "Carbon dioxide sensor based on Micromachined Fabry-Perot Interferometer",
author = "Martti Blomberg and Altti Torkkeli and Ari Lehto and Mauri Viitasalo and Matti Hohtola and Christer Helenelund",
year = "1997",
language = "English",
volume = "3",
pages = "193--198",
booktitle = "Sensor 97: eine Veranstaltung des Fachverbandes Sensorik, AMA",
publisher = "ACS Organisations GmbH",
address = "Germany",
note = "Sensor '97 : 8th International Fair with Congress for Sensors, Transducers & Systems ; Conference date: 13-05-1997 Through 15-05-1997",
}