Carbon dioxide sensor based on Micromachined Fabry-Perot Interferometer

Martti Blomberg, Altti Torkkeli, Ari Lehto, Mauri Viitasalo, Matti Hohtola, Christer Helenelund

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationSensor 97: eine Veranstaltung des Fachverbandes Sensorik, AMA
    Subtitle of host publicationProceedings
    Place of PublicationWunstorf
    PublisherACS Organisations GmbH
    Pages193-198
    Volume3
    Publication statusPublished - 1997
    MoE publication typeB3 Non-refereed article in conference proceedings
    EventSensor '97: 8th International Fair with Congress for Sensors, Transducers & Systems - Nürnberg, Germany
    Duration: 13 May 199715 May 1997

    Conference

    ConferenceSensor '97
    CountryGermany
    CityNürnberg
    Period13/05/9715/05/97

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