Carbon dioxide sensor based on Micromachined Fabry-Perot Interferometer

Martti Blomberg, Altti Torkkeli, Ari Lehto, Mauri Viitasalo, Matti Hohtola, Christer Helenelund

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationSensor 97: eine Veranstaltung des Fachverbandes Sensorik, AMA
Subtitle of host publicationProceedings
Place of PublicationWunstorf
Pages193-198
Volume3
Publication statusPublished - 1997
MoE publication typeB3 Non-refereed article in conference proceedings
EventSensor '97: 8th International Fair with Congress for Sensors, Transducers & Systems - Nürnberg, Germany
Duration: 13 May 199715 May 1997

Conference

ConferenceSensor '97
CountryGermany
CityNürnberg
Period13/05/9715/05/97

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