Carbon nanotube thin film transistors based on aerosol methods

Marina Y. Zavodchikova, Tero Kulmala, Albert Nasibulin, Vladimir Ermolov, Sami Franssila, Kestutis Grigorqas, Esko I. Kauppinen

    Research output: Contribution to journalArticleScientificpeer-review

    45 Citations (Scopus)


    We demonstrate a fabrication method for high-performance field-effect transistors (FETs) based on dry-processed random single-walled carbon nanotube networks (CNTNs) deposited at room temperature. This method is an advantageous alternative to solution-processed and direct CVD grown CNTN FETs, which allows using various substrate materials, including heat-intolerant plastic substrates, and enables an efficient, density-controlled, scalable deposition of as-produced single-walled CNTNs on the substrate directly from the aerosol (floating catalyst) synthesis reactor. Two types of thin film transistor (TFT) structures were fabricated to evaluate the FET performance of dry-processed CNTNs: bottom-gate transistors on Si/SiO2 substrates and top-gate transistors on polymer substrates. Devices exhibited on/off ratios up to 105 and field-effect mobilities up to 4 cm2 V−1 s−1. The suppression of hysteresis in the bottom-gate device transfer characteristics by means of thermal treatment in vacuum and passivation by an atomic layer deposited Al2O3 film was investigated. A 32 nm thick Al2O3 layer was found to be able to eliminate the hysteresis.
    Original languageEnglish
    Article number085201
    Number of pages9
    Issue number8
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed


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