Characterisation of Complex Multilayer Nanostructures with High Aspect Ratio
- Erkki Ikonen*
- , Aleksandr Danilenko*
- , Masoud Rastgou
- , Farshid Manoocheri
- , Jussi Kinnunen
- , Virpi Korpelainen
- , Antti Lassila
*Corresponding author for this work
- Aalto University
- University of Eastern Finland
- Chipmetrics Oy
Research output: Contribution to journal › Article › Scientific › peer-review