Characterization and operation of different cMUT membranes in air

A. Caspani; G. Langfelder; P. Minotti; A. Longoni; Jaakko Saarilahti

doi:10.1109/ULTSYM.2013.0438

Characterization and operation of different cMUT membranes in air

A. Caspani, G. Langfelder, P. Minotti, A. Longoni, Jaakko Saarilahti

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.

Original language	English
Title of host publication	2013 IEEE International Ultrasonics Symposium (IUS)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1720-1723
ISBN (Electronic)	978-1-4673-5686-2
ISBN (Print)	978-1-4673-5684-8
DOIs	https://doi.org/10.1109/ULTSYM.2013.0438
Publication status	Published - 1 Dec 2013
MoE publication type	A4 Article in a conference publication
Event	IEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013

Conference

Conference	IEEE International Ultrasonics Symposium, IUS 2013
Abbreviated title	IUS 2013
Country/Territory	Czech Republic
City	Prague
Period	21/07/13 → 25/07/13

Keywords

CMUT
Electromechanical characterization
In-air ultrasound transmission

Access to Document

10.1109/ULTSYM.2013.0438

Cite this

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title = "Characterization and operation of different cMUT membranes in air",

abstract = "Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.",

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Caspani, A, Langfelder, G, Minotti, P, Longoni, A & Saarilahti, J 2013, Characterization and operation of different cMUT membranes in air. in 2013 IEEE International Ultrasonics Symposium (IUS)., 6724996, IEEE Institute of Electrical and Electronic Engineers, pp. 1720-1723, IEEE International Ultrasonics Symposium, IUS 2013, Prague, Czech Republic, 21/07/13. https://doi.org/10.1109/ULTSYM.2013.0438

Characterization and operation of different cMUT membranes in air. / Caspani, A.; Langfelder, G.; Minotti, P.; Longoni, A.; Saarilahti, Jaakko.

2013 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers, 2013. p. 1720-1723 6724996.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Characterization and operation of different cMUT membranes in air

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AU - Langfelder, G.

AU - Minotti, P.

AU - Longoni, A.

AU - Saarilahti, Jaakko

PY - 2013/12/1

Y1 - 2013/12/1

N2 - Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.

AB - Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.

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KW - Electromechanical characterization

KW - In-air ultrasound transmission

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DO - 10.1109/ULTSYM.2013.0438

M3 - Conference article in proceedings

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SN - 978-1-4673-5684-8

SP - 1720

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T2 - IEEE International Ultrasonics Symposium, IUS 2013

Y2 - 21 July 2013 through 25 July 2013

ER -

Characterization and operation of different cMUT membranes in air

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Keywords

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