Characterization and operation of different cMUT membranes in air

A. Caspani, G. Langfelder, P. Minotti, A. Longoni, Jaakko Saarilahti

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)


    Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.
    Original languageEnglish
    Title of host publication2013 IEEE International Ultrasonics Symposium (IUS)
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4673-5686-2
    ISBN (Print)978-1-4673-5684-8
    Publication statusPublished - 1 Dec 2013
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic
    Duration: 21 Jul 201325 Jul 2013

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium


    ConferenceIEEE International Ultrasonics Symposium, IUS 2013
    Abbreviated titleIUS 2013
    Country/TerritoryCzech Republic


    • CMUT
    • Electromechanical characterization
    • In-air ultrasound transmission


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