Characterization and operation of different cMUT membranes in air

A. Caspani, G. Langfelder, P. Minotti, A. Longoni, Jaakko Saarilahti

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.

Original languageEnglish
Title of host publication2013 IEEE International Ultrasonics Symposium (IUS)
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages1720-1723
ISBN (Electronic)978-1-4673-5686-2
ISBN (Print)978-1-4673-5684-8
DOIs
Publication statusPublished - 1 Dec 2013
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic
Duration: 21 Jul 201325 Jul 2013

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2013
Abbreviated titleIUS 2013
CountryCzech Republic
CityPrague
Period21/07/1325/07/13

Fingerprint

transducers
ultrasonics
membranes
mechanical measurement
piezoelectric transducers
air
readout
optimization
geometry
configurations
electronics

Keywords

  • CMUT
  • Electromechanical characterization
  • In-air ultrasound transmission

Cite this

Caspani, A., Langfelder, G., Minotti, P., Longoni, A., & Saarilahti, J. (2013). Characterization and operation of different cMUT membranes in air. In 2013 IEEE International Ultrasonics Symposium (IUS) (pp. 1720-1723). [6724996] Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2013.0438
Caspani, A. ; Langfelder, G. ; Minotti, P. ; Longoni, A. ; Saarilahti, Jaakko. / Characterization and operation of different cMUT membranes in air. 2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE, 2013. pp. 1720-1723
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Caspani, A, Langfelder, G, Minotti, P, Longoni, A & Saarilahti, J 2013, Characterization and operation of different cMUT membranes in air. in 2013 IEEE International Ultrasonics Symposium (IUS)., 6724996, Institute of Electrical and Electronic Engineers IEEE, pp. 1720-1723, IEEE International Ultrasonics Symposium, IUS 2013, Prague, Czech Republic, 21/07/13. https://doi.org/10.1109/ULTSYM.2013.0438

Characterization and operation of different cMUT membranes in air. / Caspani, A.; Langfelder, G.; Minotti, P.; Longoni, A.; Saarilahti, Jaakko.

2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE, 2013. p. 1720-1723 6724996.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Caspani A, Langfelder G, Minotti P, Longoni A, Saarilahti J. Characterization and operation of different cMUT membranes in air. In 2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE. 2013. p. 1720-1723. 6724996 https://doi.org/10.1109/ULTSYM.2013.0438