Abstract
Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.
| Original language | English |
|---|---|
| Title of host publication | 2013 IEEE International Ultrasonics Symposium (IUS) |
| Publisher | Institute of Electrical and Electronic Engineers IEEE |
| Pages | 1720-1723 |
| ISBN (Electronic) | 978-1-4673-5686-2 |
| ISBN (Print) | 978-1-4673-5684-8 |
| DOIs | |
| Publication status | Published - 1 Dec 2013 |
| MoE publication type | A4 Article in a conference publication |
| Event | IEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013 |
Conference
| Conference | IEEE International Ultrasonics Symposium, IUS 2013 |
|---|---|
| Abbreviated title | IUS 2013 |
| Country | Czech Republic |
| City | Prague |
| Period | 21/07/13 → 25/07/13 |
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Keywords
- CMUT
- Electromechanical characterization
- In-air ultrasound transmission
Cite this
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Characterization and operation of different cMUT membranes in air. / Caspani, A.; Langfelder, G.; Minotti, P.; Longoni, A.; Saarilahti, Jaakko.
2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE, 2013. p. 1720-1723 6724996.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Characterization and operation of different cMUT membranes in air
AU - Caspani, A.
AU - Langfelder, G.
AU - Minotti, P.
AU - Longoni, A.
AU - Saarilahti, Jaakko
PY - 2013/12/1
Y1 - 2013/12/1
N2 - Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.
AB - Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.
KW - CMUT
KW - Electromechanical characterization
KW - In-air ultrasound transmission
UR - http://www.scopus.com/inward/record.url?scp=84894357194&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2013.0438
DO - 10.1109/ULTSYM.2013.0438
M3 - Conference article in proceedings
SN - 978-1-4673-5684-8
SP - 1720
EP - 1723
BT - 2013 IEEE International Ultrasonics Symposium (IUS)
PB - Institute of Electrical and Electronic Engineers IEEE
ER -