Abstract
Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.
Original language | English |
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Title of host publication | 2013 IEEE International Ultrasonics Symposium (IUS) |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 1720-1723 |
ISBN (Electronic) | 978-1-4673-5686-2 |
ISBN (Print) | 978-1-4673-5684-8 |
DOIs | |
Publication status | Published - 1 Dec 2013 |
MoE publication type | A4 Article in a conference publication |
Event | IEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013 |
Conference
Conference | IEEE International Ultrasonics Symposium, IUS 2013 |
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Abbreviated title | IUS 2013 |
Country/Territory | Czech Republic |
City | Prague |
Period | 21/07/13 → 25/07/13 |
Keywords
- CMUT
- Electromechanical characterization
- In-air ultrasound transmission