@inproceedings{0a8933618f594667b0c380c9ad52a088,
title = "Characterization and operation of different cMUT membranes in air",
abstract = "Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.",
keywords = "CMUT, Electromechanical characterization, In-air ultrasound transmission",
author = "A. Caspani and G. Langfelder and P. Minotti and A. Longoni and Jaakko Saarilahti",
year = "2013",
month = dec,
day = "1",
doi = "10.1109/ULTSYM.2013.0438",
language = "English",
isbn = "978-1-4673-5684-8",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "1720--1723",
booktitle = "2013 IEEE International Ultrasonics Symposium (IUS)",
address = "United States",
note = "IEEE International Ultrasonics Symposium, IUS 2013, IUS 2013 ; Conference date: 21-07-2013 Through 25-07-2013",
}