Characterization and operation of different cMUT membranes in air

A. Caspani, G. Langfelder, P. Minotti, A. Longoni, Jaakko Saarilahti

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)

    Abstract

    Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for short-range ultrasound transmission.

    Original languageEnglish
    Title of host publication2013 IEEE International Ultrasonics Symposium (IUS)
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1720-1723
    ISBN (Electronic)978-1-4673-5686-2
    ISBN (Print)978-1-4673-5684-8
    DOIs
    Publication statusPublished - 1 Dec 2013
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium, IUS 2013 - Prague, Czech Republic
    Duration: 21 Jul 201325 Jul 2013

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2013
    Abbreviated titleIUS 2013
    CountryCzech Republic
    CityPrague
    Period21/07/1325/07/13

    Keywords

    • CMUT
    • Electromechanical characterization
    • In-air ultrasound transmission

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  • Cite this

    Caspani, A., Langfelder, G., Minotti, P., Longoni, A., & Saarilahti, J. (2013). Characterization and operation of different cMUT membranes in air. In 2013 IEEE International Ultrasonics Symposium (IUS) (pp. 1720-1723). [6724996] IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ULTSYM.2013.0438