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Keyphrases
Diamond-like
100%
Plasma Beam
100%
Ion Beam
100%
Carbon Film
100%
Self-bias
100%
Pulsed Bias
100%
Process Use
75%
Gas Pressure
75%
Cathodic Arc Process
75%
Carbon Source
50%
RF Plasma
50%
Transmission Electron Microscopy
50%
Molecular Ions
50%
Wear Rate
25%
Friction Coefficient
25%
Wear Coefficient
25%
Spectrometry
25%
Elastic Modulus
25%
Deposition Process
25%
Deposited Film
25%
Hydrocarbon Gases
25%
Selected Area Electron Diffraction
25%
Hydrogen-free
25%
Atomic Ions
25%
Graphite Electrode
25%
Dissimilar Substrates
25%
Cathodic Arc Plasma
25%
Elastic Recoil
25%
Deposition Methods
25%
Backscattering Techniques
25%
INIS
performance
100%
diamonds
100%
plasma
100%
carbon
100%
films
100%
ion beams
100%
gases
50%
energy
37%
deposits
37%
deposition
25%
transmission electron microscopy
25%
carbon sources
25%
molecular ions
25%
hardness
12%
hydrocarbons
12%
friction
12%
wear
12%
substrates
12%
hydrogen
12%
graphite
12%
ions
12%
electrodes
12%
spectrometry
12%
recoils
12%
diffraction
12%
backscattering
12%
atomic ions
12%
Engineering
Diamond-Like Carbon
100%
Cathodic Arc
100%
Gas Pressure
75%
Arc Process
75%
Deposited Film
50%
Deposition Method
25%
Graphite Electrode
25%
Deposition Process
25%
Modulus of Elasticity
25%
Coefficient of Friction
25%
Chemical Engineering
Film
100%
Spectrometry
12%