Characterization of a fabrication process for the integration of superconducting qubits and rapid-single-flux-quantum circuits

Maria Gabriella Castellano, Leif Grönberg, Pasquale Carelli, Fabio Chiarello, Carlo Cosmelli, Roberto Leoni, Stefano Poletto, Guido Torrioli, Juha Hassel, Panu Helistö

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)

    Abstract

    In order to integrate superconducting qubits with rapid-single-flux-quantum (RSFQ) control circuitry, it is necessary to develop a fabrication process that simultaneously fulfils the requirements of both elements: low critical current density, very low operating temperature (tens of millikelvin) and reduced dissipation on the qubit side; high operation frequency, large stability margins, low dissipated power on the RSFQ side. For this purpose, VTT has developed a fabrication process based on Nb trilayer technology, which allows the on-chip integration of superconducting qubits and RSFQ circuits even at very low temperature. Here we present the characterization (at 4.2 K) of the process from the point of view of the Josephson devices and show that they are suitable to build integrated superconducting qubits.
    Original languageEnglish
    Pages (from-to)860-864
    Number of pages5
    JournalSuperconductor Science and Technology
    Volume19
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Keywords

    • qubits
    • Josephson junction
    • superconducting junction devices

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