TY - JOUR
T1 - Characterization of a fabrication process for the integration of superconducting qubits and rapid-single-flux-quantum circuits
AU - Castellano, Maria Gabriella
AU - Grönberg, Leif
AU - Pasquale Carelli, null
AU - Chiarello, Fabio
AU - Cosmelli, Carlo
AU - Leoni, Roberto
AU - Poletto, Stefano
AU - Torrioli, Guido
AU - Hassel, Juha
AU - Helistö, Panu
PY - 2006
Y1 - 2006
N2 - In order to integrate superconducting qubits with rapid-single-flux-quantum (RSFQ) control circuitry, it is necessary to develop a fabrication process that simultaneously fulfils the requirements of both elements: low critical current density, very low operating temperature (tens of millikelvin) and reduced dissipation on the qubit side; high operation frequency, large stability margins, low dissipated power on the RSFQ side. For this purpose, VTT has developed a fabrication process based on Nb trilayer technology, which allows the on-chip integration of superconducting qubits and RSFQ circuits even at very low temperature. Here we present the characterization (at 4.2 K) of the process from the point of view of the Josephson devices and show that they are suitable to build integrated superconducting qubits.
AB - In order to integrate superconducting qubits with rapid-single-flux-quantum (RSFQ) control circuitry, it is necessary to develop a fabrication process that simultaneously fulfils the requirements of both elements: low critical current density, very low operating temperature (tens of millikelvin) and reduced dissipation on the qubit side; high operation frequency, large stability margins, low dissipated power on the RSFQ side. For this purpose, VTT has developed a fabrication process based on Nb trilayer technology, which allows the on-chip integration of superconducting qubits and RSFQ circuits even at very low temperature. Here we present the characterization (at 4.2 K) of the process from the point of view of the Josephson devices and show that they are suitable to build integrated superconducting qubits.
KW - qubits
KW - Josephson junction
KW - superconducting junction devices
U2 - 10.1088/0953-2048/19/8/030
DO - 10.1088/0953-2048/19/8/030
M3 - Article
SN - 0953-2048
VL - 19
SP - 860
EP - 864
JO - Superconductor Science and Technology
JF - Superconductor Science and Technology
ER -