Characterization of a fabrication process for the integration of superconducting qubits and rapid-single-flux-quantum circuits

Maria Gabriella Castellano, Leif Grönberg, Pasquale Carelli, Fabio Chiarello, Carlo Cosmelli, Roberto Leoni, Stefano Poletto, Guido Torrioli, Juha Hassel, Panu Helistö

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