Characterization of ALD materials for optical applications in the ultraviolet range

Andreas Langner (Corresponding author), Emma Färm, Oili Ylivaara, Mikko Ritala, Markku Leskelä, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Langner, A., Färm, E., Ylivaara, O., Ritala, M., Leskelä, M., & Puurunen, R. L. (2014). Characterization of ALD materials for optical applications in the ultraviolet range. In BALD2014 Abstract book