Characterization of ALD materials for optical applications in the ultraviolet range

Andreas Langner (Corresponding author), Emma Färm, Oili Ylivaara, Mikko Ritala, Markku Leskelä, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Langner, A., Färm, E., Ylivaara, O., Ritala, M., Leskelä, M., & Puurunen, R. L. (2014). Characterization of ALD materials for optical applications in the ultraviolet range. In BALD2014 Abstract book
    Langner, Andreas ; Färm, Emma ; Ylivaara, Oili ; Ritala, Mikko ; Leskelä, Markku ; Puurunen, Riikka L. / Characterization of ALD materials for optical applications in the ultraviolet range. BALD2014 Abstract book. 2014.
    @inbook{ca68695440a04f94ae350fcfa1b5a5a4,
    title = "Characterization of ALD materials for optical applications in the ultraviolet range",
    author = "Andreas Langner and Emma F{\"a}rm and Oili Ylivaara and Mikko Ritala and Markku Leskel{\"a} and Puurunen, {Riikka L.}",
    note = "Published abstract of a poster presentation Project 102086 ALDCoE",
    year = "2014",
    language = "English",
    booktitle = "BALD2014 Abstract book",

    }

    Langner, A, Färm, E, Ylivaara, O, Ritala, M, Leskelä, M & Puurunen, RL 2014, Characterization of ALD materials for optical applications in the ultraviolet range. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

    Characterization of ALD materials for optical applications in the ultraviolet range. / Langner, Andreas (Corresponding author); Färm, Emma ; Ylivaara, Oili; Ritala, Mikko; Leskelä, Markku; Puurunen, Riikka L.

    BALD2014 Abstract book. 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Characterization of ALD materials for optical applications in the ultraviolet range

    AU - Langner, Andreas

    AU - Färm, Emma

    AU - Ylivaara, Oili

    AU - Ritala, Mikko

    AU - Leskelä, Markku

    AU - Puurunen, Riikka L.

    N1 - Published abstract of a poster presentation Project 102086 ALDCoE

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - BALD2014 Abstract book

    ER -

    Langner A, Färm E, Ylivaara O, Ritala M, Leskelä M, Puurunen RL. Characterization of ALD materials for optical applications in the ultraviolet range. In BALD2014 Abstract book. 2014