Characterization of ALD materials for optical applications in the ultraviolet range

Andreas Langner (Corresponding author), Emma Färm, Oili Ylivaara, Mikko Ritala, Markku Leskelä, Riikka L. Puurunen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationBALD2014 Abstract book
Publication statusPublished - 2014
Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
Duration: 12 May 201413 May 2014
Conference number: 12
http://www.aldcoe.fi/bald2014/program.pdf (Program)
http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated titleBaltic ALD 2014
CountryFinland
CityHelsinki
Period12/05/1413/05/14
OtherAbstracts reviewed and published.
Internet address

Cite this

Langner, A., Färm, E., Ylivaara, O., Ritala, M., Leskelä, M., & Puurunen, R. L. (2014). Characterization of ALD materials for optical applications in the ultraviolet range. In BALD2014 Abstract book
Langner, Andreas ; Färm, Emma ; Ylivaara, Oili ; Ritala, Mikko ; Leskelä, Markku ; Puurunen, Riikka L. / Characterization of ALD materials for optical applications in the ultraviolet range. BALD2014 Abstract book. 2014.
@inbook{ca68695440a04f94ae350fcfa1b5a5a4,
title = "Characterization of ALD materials for optical applications in the ultraviolet range",
author = "Andreas Langner and Emma F{\"a}rm and Oili Ylivaara and Mikko Ritala and Markku Leskel{\"a} and Puurunen, {Riikka L.}",
note = "Published abstract of a poster presentation Project 102086 ALDCoE",
year = "2014",
language = "English",
booktitle = "BALD2014 Abstract book",

}

Langner, A, Färm, E, Ylivaara, O, Ritala, M, Leskelä, M & Puurunen, RL 2014, Characterization of ALD materials for optical applications in the ultraviolet range. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

Characterization of ALD materials for optical applications in the ultraviolet range. / Langner, Andreas (Corresponding author); Färm, Emma ; Ylivaara, Oili; Ritala, Mikko; Leskelä, Markku; Puurunen, Riikka L.

BALD2014 Abstract book. 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Characterization of ALD materials for optical applications in the ultraviolet range

AU - Langner, Andreas

AU - Färm, Emma

AU - Ylivaara, Oili

AU - Ritala, Mikko

AU - Leskelä, Markku

AU - Puurunen, Riikka L.

N1 - Published abstract of a poster presentation Project 102086 ALDCoE

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

ER -

Langner A, Färm E, Ylivaara O, Ritala M, Leskelä M, Puurunen RL. Characterization of ALD materials for optical applications in the ultraviolet range. In BALD2014 Abstract book. 2014