Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication

Kristina Bespalova, Elmeri Österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala

Research output: Contribution to journalArticleScientificpeer-review

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Engineering & Materials Science