Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.
|Title of host publication||Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003|
|Publisher||Japan Society of Mechanical Engineers|
|Publication status||Published - 2003|
|MoE publication type||Not Eligible|
|Event||International Conference on Advanced Technology in Experimental Mechanics, ATEM 03 - Nagoya, Japan|
Duration: 10 Sep 2003 → 12 Sep 2003
|Conference||International Conference on Advanced Technology in Experimental Mechanics, ATEM 03|
|Period||10/09/03 → 12/09/03|
- metallic micromachining
- mechanical characterization
- Mictamict alloys
- amorphous metals
Kattelus, H., Ylönen, M., & Blomberg, M. (2003). Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications. In Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003 Japan Society of Mechanical Engineers.