Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

Hannu Kattelus; Mari Ylönen; Martti Blomberg

Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

Hannu Kattelus, Mari Ylönen, Martti Blomberg

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.

Original language	English
Title of host publication	Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003
Publisher	Japan Society of Mechanical Engineers
Publication status	Published - 2003
MoE publication type	Not Eligible
Event	International Conference on Advanced Technology in Experimental Mechanics, ATEM 03 - Nagoya, Japan Duration: 10 Sept 2003 → 12 Sept 2003

Conference

Conference	International Conference on Advanced Technology in Experimental Mechanics, ATEM 03
Country/Territory	Japan
City	Nagoya
Period	10/09/03 → 12/09/03

Keywords

metallic micromachining
stress
indentation
mechanical characterization
Mo-Si-N
Mictamict alloys
amorphous metals

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications",

abstract = "Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.",

keywords = "metallic micromachining, stress, indentation, mechanical characterization, Mo-Si-N, Mictamict alloys, amorphous metals",

author = "Hannu Kattelus and Mari Yl{\"o}nen and Martti Blomberg",

note = "CD-ROM proceedings, no ISBN/ISSN found; International Conference on Advanced Technology in Experimental Mechanics, ATEM 03 ; Conference date: 10-09-2003 Through 12-09-2003",

year = "2003",

language = "English",

booktitle = "Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003",

publisher = "Japan Society of Mechanical Engineers",

address = "Japan",

}

Kattelus, H, Ylönen, M & Blomberg, M 2003, Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications. in Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003. Japan Society of Mechanical Engineers, International Conference on Advanced Technology in Experimental Mechanics, ATEM 03, Nagoya, Japan, 10/09/03.

Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications. / Kattelus, Hannu; Ylönen, Mari; Blomberg, Martti.
Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003. Japan Society of Mechanical Engineers, 2003.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

AU - Kattelus, Hannu

AU - Ylönen, Mari

AU - Blomberg, Martti

N1 - CD-ROM proceedings, no ISBN/ISSN found

PY - 2003

Y1 - 2003

N2 - Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.

AB - Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.

KW - metallic micromachining

KW - stress

KW - indentation

KW - mechanical characterization

KW - Mo-Si-N

KW - Mictamict alloys

KW - amorphous metals

M3 - Conference article in proceedings

BT - Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003

PB - Japan Society of Mechanical Engineers

T2 - International Conference on Advanced Technology in Experimental Mechanics, ATEM 03

Y2 - 10 September 2003 through 12 September 2003

ER -

Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

Abstract

Conference

Keywords

UN SDGs

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