Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

Hannu Kattelus, Mari Ylönen, Martti Blomberg

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called “mictamict” group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.
    Original languageEnglish
    Title of host publicationProceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003
    PublisherJapan Society of Mechanical Engineers
    Publication statusPublished - 2003
    MoE publication typeNot Eligible
    EventInternational Conference on Advanced Technology in Experimental Mechanics, ATEM 03 - Nagoya, Japan
    Duration: 10 Sep 200312 Sep 2003

    Conference

    ConferenceInternational Conference on Advanced Technology in Experimental Mechanics, ATEM 03
    CountryJapan
    CityNagoya
    Period10/09/0312/09/03

    Keywords

    • metallic micromachining
    • stress
    • indentation
    • mechanical characterization
    • Mo-Si-N
    • Mictamict alloys
    • amorphous metals

    Fingerprint Dive into the research topics of 'Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications'. Together they form a unique fingerprint.

  • Cite this

    Kattelus, H., Ylönen, M., & Blomberg, M. (2003). Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications. In Proceedings of ATEM '03: International Conference on Advanced Technology in Experimental Mechanics 2003 Japan Society of Mechanical Engineers.