Characterization of CMOS compatible RF MEMS switch at cryogenic temperatures

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    In this paper, a CMOS compatible micromechanical RF switch is reported and its mechanical performance is studied on a wide temperature range from 295 K down to 20 K. A switch with a clamped-clamped structure showed plastic deformation during the cooling and finally failed during the warming cycle. On the contrary, a switch with a cantilever structure was functional throughout the test cycles.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2007
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages639-642
    ISBN (Print)1-4244-0841-5, 1-4244-0842-3
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    Event14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '07 and EUROSENSORS XXI - Lyon, France
    Duration: 10 Jun 200714 Jun 2007

    Conference

    Conference14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '07 and EUROSENSORS XXI
    Abbreviated titleTRANSDUCERS '07 and EUROSENSORS XXI
    CountryFrance
    CityLyon
    Period10/06/0714/06/07

    Keywords

    • CMOS
    • RF
    • RF-MEMS
    • RF switch
    • cryogenics

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