Characterization of CMOS compatible RF MEMS switch at cryogenic temperatures

Pekka Rantakari, Tauno Vähä-Heikkilä

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    5 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Characterization of CMOS compatible RF MEMS switch at cryogenic temperatures'. Together they form a unique fingerprint.

    Keyphrases

    Engineering

    INIS

    Material Science