Characterization of energy trapping in a bulk acoustic wave resonator

Kimmo Kokkonen (Corresponding Author), Johanna Meltaus, Tuomas Pensala, Matti Kaivola

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    Abstract

    Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measured dispersion properties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed.
    Original languageEnglish
    Article number233507
    JournalApplied Physics Letters
    Volume97
    Issue number23
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

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    Keywords

    • acoustic resonators
    • bulk acoustic wave devices
    • light interferometers

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