Characterization of energy trapping in a bulk acoustic wave resonator

Kimmo Kokkonen (Corresponding Author), Johanna Meltaus, Tuomas Pensala, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Abstract

Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measured dispersion properties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed.
Original languageEnglish
Article number233507
JournalApplied Physics Letters
Volume97
Issue number23
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Fingerprint

resonators
trapping
acoustics
energy
leakage
diagrams
wave dispersion
sound waves
vibration mode
cut-off
interferometers
thresholds
electrodes
curves
lasers
simulation

Keywords

  • acoustic resonators
  • bulk acoustic wave devices
  • light interferometers

Cite this

Kokkonen, Kimmo ; Meltaus, Johanna ; Pensala, Tuomas ; Kaivola, Matti. / Characterization of energy trapping in a bulk acoustic wave resonator. In: Applied Physics Letters. 2010 ; Vol. 97, No. 23.
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Characterization of energy trapping in a bulk acoustic wave resonator. / Kokkonen, Kimmo (Corresponding Author); Meltaus, Johanna; Pensala, Tuomas; Kaivola, Matti.

In: Applied Physics Letters, Vol. 97, No. 23, 233507, 2010.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Meltaus, Johanna

AU - Pensala, Tuomas

AU - Kaivola, Matti

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N2 - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measured dispersion properties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed.

AB - Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic wave resonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measured dispersion properties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed.

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JO - Applied Physics Letters

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