Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

Riitta Zilliacus (Corresponding Author), Jari Likonen, Helena Ronkainen, Juha-Pekka Hirvonen

Research output: Contribution to journalArticleScientificpeer-review

Abstract

The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.
Original languageEnglish
Pages (from-to)175-179
Number of pages5
JournalApplied Surface Science
Volume75
Issue number1-4
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

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Secondary ion mass spectrometry
Carbon
Coatings
Substrates
Adhesion
Depth profiling
Carbon films
Impurities
Corrosion
Chemical analysis

Cite this

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title = "Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS",
abstract = "The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.",
author = "Riitta Zilliacus and Jari Likonen and Helena Ronkainen and Juha-Pekka Hirvonen",
note = "Project code: KOT1010",
year = "1994",
doi = "10.1016/0169-4332(94)90156-2",
language = "English",
volume = "75",
pages = "175--179",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
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}

Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS. / Zilliacus, Riitta (Corresponding Author); Likonen, Jari; Ronkainen, Helena; Hirvonen, Juha-Pekka.

In: Applied Surface Science, Vol. 75, No. 1-4, 1994, p. 175-179.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

AU - Zilliacus, Riitta

AU - Likonen, Jari

AU - Ronkainen, Helena

AU - Hirvonen, Juha-Pekka

N1 - Project code: KOT1010

PY - 1994

Y1 - 1994

N2 - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.

AB - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.

U2 - 10.1016/0169-4332(94)90156-2

DO - 10.1016/0169-4332(94)90156-2

M3 - Article

VL - 75

SP - 175

EP - 179

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 1-4

ER -