Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

Riitta Zilliacus (Corresponding Author), Jari Likonen, Helena Ronkainen, Juha-Pekka Hirvonen

    Research output: Contribution to journalArticleScientificpeer-review


    The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.
    Original languageEnglish
    Pages (from-to)175-179
    Number of pages5
    JournalApplied Surface Science
    Issue number1-4
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed


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