Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

Riitta Zilliacus; Jari Likonen; Helena Ronkainen; Juha-Pekka Hirvonen

doi:10.1016/0169-4332(94)90156-2

Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

Riitta Zilliacus^*
, Jari Likonen
, Helena Ronkainen
, Juha-Pekka Hirvonen

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.

Original language	English
Pages (from-to)	175-179
Journal	Applied Surface Science
Volume	75
Issue number	1-4
DOIs	https://doi.org/10.1016/0169-4332(94)90156-2
Publication status	Published - 1994
MoE publication type	A1 Journal article-refereed

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title = "Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS",

abstract = "The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.",

author = "Riitta Zilliacus and Jari Likonen and Helena Ronkainen and Juha-Pekka Hirvonen",

note = "Project code: KOT1010",

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journal = "Applied Surface Science",

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T1 - Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

AU - Zilliacus, Riitta

AU - Likonen, Jari

AU - Ronkainen, Helena

AU - Hirvonen, Juha-Pekka

N1 - Project code: KOT1010

PY - 1994

Y1 - 1994

N2 - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.

AB - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.

U2 - 10.1016/0169-4332(94)90156-2

DO - 10.1016/0169-4332(94)90156-2

M3 - Article

SN - 0169-4332

VL - 75

SP - 175

EP - 179

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS

Abstract

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