TY - JOUR
T1 - Characterization of interfaces between TiN or hard carbon coating and substrate by SIMS
AU - Zilliacus, Riitta
AU - Likonen, Jari
AU - Ronkainen, Helena
AU - Hirvonen, Juha-Pekka
N1 - Project code: KOT1010
PY - 1994
Y1 - 1994
N2 - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.
AB - The composition of the interface has an effect on the adhesion between substrate and coating and on the corrosion properties of the coating. In this work, the interfaces between (Ti, Al)N and hard carbon coatings and the substrates were studied using secondary ion mass spectrometry (SIMS). By using SIMS depth profiling, the impurities on the substrate were analyzed in order to study their influence on the characteristics of the coating and the coating adhesion. Different intermediate layers used to improve the adhesion between the hard carbon film and the substrate were also studied by depth profiling.
U2 - 10.1016/0169-4332(94)90156-2
DO - 10.1016/0169-4332(94)90156-2
M3 - Article
SN - 0169-4332
VL - 75
SP - 175
EP - 179
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-4
ER -