Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Jussi Mäkynen

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.
Original languageEnglish
Article number075011
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number7
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Fingerprint

Interferometers
Tuning
Infrared radiation
Infrared spectrometers
Spectrometers
Fourier transforms
Mirrors
Gases
Wavelength
Computer simulation
Electric potential
Hot Temperature

Keywords

  • interferometers
  • infrared spectrometers
  • auxiliary equipment and techniques

Cite this

@article{b636e89652434f299cf140f7eae5e7c9,
title = "Characterization of the tuning performance of a micro-machined Fabry-P{\'e}rot interferometer for thermal infrared",
abstract = "We developed a tunable surface-micromachined Fabry–P{\'e}rot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.",
keywords = "interferometers, infrared spectrometers, auxiliary equipment and techniques",
author = "Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Jussi M{\"a}kynen",
year = "2013",
doi = "10.1088/0960-1317/23/7/075011",
language = "English",
volume = "23",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics IOP",
number = "7",

}

Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Näsilä, Antti; Mäkynen, Jussi.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 7, 075011, 2013.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared

AU - Tuohiniemi, Mikko

AU - Näsilä, Antti

AU - Mäkynen, Jussi

PY - 2013

Y1 - 2013

N2 - We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.

AB - We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.

KW - interferometers

KW - infrared spectrometers

KW - auxiliary equipment and techniques

U2 - 10.1088/0960-1317/23/7/075011

DO - 10.1088/0960-1317/23/7/075011

M3 - Article

VL - 23

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 7

M1 - 075011

ER -