Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Jussi Mäkynen

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)

    Abstract

    We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.
    Original languageEnglish
    Article number075011
    JournalJournal of Micromechanics and Microengineering
    Volume23
    Issue number7
    DOIs
    Publication statusPublished - 2013
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Interferometers
    Tuning
    Infrared radiation
    Infrared spectrometers
    Spectrometers
    Fourier transforms
    Mirrors
    Gases
    Wavelength
    Computer simulation
    Electric potential
    Hot Temperature

    Keywords

    • interferometers
    • infrared spectrometers
    • auxiliary equipment and techniques

    Cite this

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    title = "Characterization of the tuning performance of a micro-machined Fabry-P{\'e}rot interferometer for thermal infrared",
    abstract = "We developed a tunable surface-micromachined Fabry–P{\'e}rot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.",
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    author = "Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Jussi M{\"a}kynen",
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    Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Näsilä, Antti; Mäkynen, Jussi.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 7, 075011, 2013.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared

    AU - Tuohiniemi, Mikko

    AU - Näsilä, Antti

    AU - Mäkynen, Jussi

    PY - 2013

    Y1 - 2013

    N2 - We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.

    AB - We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study.

    KW - interferometers

    KW - infrared spectrometers

    KW - auxiliary equipment and techniques

    U2 - 10.1088/0960-1317/23/7/075011

    DO - 10.1088/0960-1317/23/7/075011

    M3 - Article

    VL - 23

    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

    IS - 7

    M1 - 075011

    ER -