Characterization of the tuning performance of a micro-machined Fabry-Pérot interferometer for thermal infrared

Engineering

• Actuation 100%
• Applied Voltage 33%
• Bridges 33%
• Capacitive 33%
• Characteristics 33%
• Computer Simulation 33%
• Design 33%
• Fourier Transform Infrared Spectrometer 33%
• Laboratories 33%
• Measurement 33%
• Models 33%
• Performance 100%
• Spectral Region 33%
• Spectrometer 33%
• Surfaces 33%
• Transmissions 66%
• Wavelength 33%

Physics

• Gaps 33%
• Gases 33%
• Mirrors 33%
• Model 33%
• Performance 100%
• Width 33%

Material Science

• Characterization 33%
• Devices 100%
• Gas 33%
• Surface 33%