Characterization of thin films and their structures in surface plasmon resonance measurements

Janusz Sadowski, Ilkka Korhonen, Jouko Peltonen

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)

Abstract

An approach to quantitative evaluation of surface plasmon resonance (SPR) measurements is given.
In order to determine thicknesses and refractive indices, measured SPR curves were fitted numerically with a theoretical model based on the Fresnel equations. The model also takes into account additional roughness layers, representing real properties of the interfaces, which significantly improves the fitting accuracy.
The intermediate layers have physical thicknesses and effective complex refractive indices, responsible for light losses at the interfaces. This model has been verified by direct measurement of surface roughness with the help of an atomic force microscope (AFM).
It has turned out that the fitting procedure can reveal microstructures of a substrate and deposited layer, and when combined with the AFM for roughness measurement, this model can find simultaneously both the thickness and the refractive index of the metal film.
Original languageEnglish
Pages (from-to)2581-2586
JournalOptical Engineering
Volume34
Issue number9
DOIs
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

Fingerprint

Surface plasmon resonance
surface plasmon resonance
Thin films
Refractive index
refractivity
thin films
Microscopes
roughness
Surface roughness
microscopes
Roughness measurement
metal films
surface roughness
microstructure
Microstructure
evaluation
Substrates
curves
Metals

Cite this

Sadowski, Janusz ; Korhonen, Ilkka ; Peltonen, Jouko. / Characterization of thin films and their structures in surface plasmon resonance measurements. In: Optical Engineering. 1995 ; Vol. 34, No. 9. pp. 2581-2586.
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Characterization of thin films and their structures in surface plasmon resonance measurements. / Sadowski, Janusz; Korhonen, Ilkka; Peltonen, Jouko.

In: Optical Engineering, Vol. 34, No. 9, 1995, p. 2581-2586.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Korhonen, Ilkka

AU - Peltonen, Jouko

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AB - An approach to quantitative evaluation of surface plasmon resonance (SPR) measurements is given. In order to determine thicknesses and refractive indices, measured SPR curves were fitted numerically with a theoretical model based on the Fresnel equations. The model also takes into account additional roughness layers, representing real properties of the interfaces, which significantly improves the fitting accuracy. The intermediate layers have physical thicknesses and effective complex refractive indices, responsible for light losses at the interfaces. This model has been verified by direct measurement of surface roughness with the help of an atomic force microscope (AFM). It has turned out that the fitting procedure can reveal microstructures of a substrate and deposited layer, and when combined with the AFM for roughness measurement, this model can find simultaneously both the thickness and the refractive index of the metal film.

U2 - 10.1117/12.208083

DO - 10.1117/12.208083

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