CMOS Compatible MEMS Varactors for Millimeter Waves

Tauno Vähä-Heikkilä, Mari Ylönen, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A CMOS compatible metal micromachining fabrication has been used for realizing tunable millimeter wave MEMS components. Experimental results show that components can be optimized to have wideband performance with low loss and good matching. Repeatability measurements have been carried out for digital type switched capacitors without significant change in the component performance, when they were cycled between states up to 50 million times with 100 Hz frequency and 50% duty cycle.
Original languageEnglish
Title of host publicationProceedings of 4th ESA Workshop on Millimetre Wave Technology and Applications, The 8th Topical Symposium on Millimeter Waves - TSMMW2006, The 7th MINT Millimeter-Wave International Symposium - MINT-MIS2006
Pages527-531
Publication statusPublished - 2006
MoE publication typeNot Eligible
Event4th ESA Workshop on Millimetre-Wave Technology and Applications; 8th Topical Symposium on Millimeter Waves, TSMMW2006; 7th MINT Millimeter-Wave International Symposium, MINT-MIS2006 - Espoo, Finland
Duration: 15 Feb 200617 Feb 2006

Conference

Conference4th ESA Workshop on Millimetre-Wave Technology and Applications; 8th Topical Symposium on Millimeter Waves, TSMMW2006; 7th MINT Millimeter-Wave International Symposium, MINT-MIS2006
CountryFinland
CityEspoo
Period15/02/0617/02/06

Keywords

  • MEMS
  • CMOS
  • varactor

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  • Cite this

    Vähä-Heikkilä, T., Ylönen, M., & Kattelus, H. (2006). CMOS Compatible MEMS Varactors for Millimeter Waves. In Proceedings of 4th ESA Workshop on Millimetre Wave Technology and Applications, The 8th Topical Symposium on Millimeter Waves - TSMMW2006, The 7th MINT Millimeter-Wave International Symposium - MINT-MIS2006 (pp. 527-531)