A CMOS compatible metal micromachining fabrication has been used for realizing tunable millimeter wave MEMS components. Experimental results show that components can be optimized to have wideband performance with low loss and good matching. Repeatability measurements have been carried out for digital type switched capacitors without significant change in the component performance, when they were cycled between states up to 50 million times with 100 Hz frequency and 50% duty cycle.
|Title of host publication||Proceedings of 4th ESA Workshop on Millimetre Wave Technology and Applications, The 8th Topical Symposium on Millimeter Waves - TSMMW2006, The 7th MINT Millimeter-Wave International Symposium - MINT-MIS2006|
|Publication status||Published - 2006|
|MoE publication type||Not Eligible|
|Event||4th ESA Workshop on Millimetre-Wave Technology and Applications; 8th Topical Symposium on Millimeter Waves, TSMMW2006; 7th MINT Millimeter-Wave International Symposium, MINT-MIS2006 - Espoo, Finland|
Duration: 15 Feb 2006 → 17 Feb 2006
|Conference||4th ESA Workshop on Millimetre-Wave Technology and Applications; 8th Topical Symposium on Millimeter Waves, TSMMW2006; 7th MINT Millimeter-Wave International Symposium, MINT-MIS2006|
|Period||15/02/06 → 17/02/06|