CMOS compatible switched MEMS capacitors up to 220 GHz applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

    Abstract

    Very wideband switched MEMS capacitors have been designed and fabricated using CMOS compatible surface micromachining process. On-wafer measurement results are presented at G-band (140-220 GHz) up to 220 GHz showing that MEMS components can be modelled accurately with lumped elements and transmission line models.
    Original languageEnglish
    Title of host publicationProceedings of the 36th European Microwave Conference
    Subtitle of host publicationManchester, UK, 10-15 September 2006
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1060-1063
    ISBN (Print)2-9600551-6-0
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

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