CMOS compatible switched MEMS capacitors up to 220 GHz applications

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Abstract

Very wideband switched MEMS capacitors have been designed and fabricated using CMOS compatible surface micromachining process. On-wafer measurement results are presented at G-band (140-220 GHz) up to 220 GHz showing that MEMS components can be modelled accurately with lumped elements and transmission line models.
Original languageEnglish
Title of host publicationProceedings of the 36th European Microwave Conference
Subtitle of host publicationManchester, UK, 10-15 September 2006
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1060-1063
ISBN (Print)2-9600551-6-0
DOIs
Publication statusPublished - 2006
MoE publication typeA4 Article in a conference publication

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  • Cite this

    Vähä-Heikkilä, T., & Ylönen, M. (2006). CMOS compatible switched MEMS capacitors up to 220 GHz applications. In Proceedings of the 36th European Microwave Conference: Manchester, UK, 10-15 September 2006 (pp. 1060-1063). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/EUMC.2006.281116