CMOS compatible switched MEMS capacitors up to 220 GHz applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

    Fingerprint Dive into the research topics of 'CMOS compatible switched MEMS capacitors up to 220 GHz applications'. Together they form a unique fingerprint.

    Physics & Astronomy