Abstract
The throughput is an important parameter for label-free biosensors.
Acoustic resonators like the quartz crystal microbalance have a low
throughput because the number of sensors which can be used at the same
time is limited. Here we present an array of 64 CMOS-integrated film
bulk acoustic resonators. We compare the performance with surface
plasmon resonance and the quartz crystal microbalance and demonstrate
the performance of the sensor for multiplexed detection of DNA.
Original language | English |
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Pages (from-to) | 4180-4193 |
Number of pages | 14 |
Journal | Sensors |
Volume | 10 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2010 |
MoE publication type | A1 Journal article-refereed |
Keywords
- Biomolecular interaction analysis
- Biosensor
- CMOS
- DNA
- FBAR
- Film bulk acoustic resonator
- Label-free
- Thickness shear mode
- TSM