CMOS-integrated film bulk acoustic resonators for label-free biosensing

M. Nirschl (Corresponding Author), Arto Rantala, Kari Tukkiniemi, Sanna Auer, A.-C. Hellgren, D. Pitzer, M. Schreiter, Inger Vikholm-Lundin

Research output: Contribution to journalArticleScientificpeer-review

47 Citations (Scopus)

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
Original languageEnglish
Pages (from-to)4180-4193
Number of pages14
JournalSensors
Volume10
Issue number5
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Fingerprint

Quartz Crystal Microbalance Techniques
Acoustic resonators
Quartz crystal microbalances
quartz crystals
Acoustics
microbalances
Labels
CMOS
resonators
Throughput
Surface Plasmon Resonance
acoustics
sensors
Sensors
Surface plasmon resonance
Biosensing Techniques
bioinstrumentation
surface plasmon resonance
Biosensors
DNA

Keywords

  • Biomolecular interaction analysis
  • Biosensor
  • CMOS
  • DNA
  • FBAR
  • Film bulk acoustic resonator
  • Label-free
  • Thickness shear mode
  • TSM

Cite this

Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A-C., Pitzer, D., ... Vikholm-Lundin, I. (2010). CMOS-integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10(5), 4180-4193. https://doi.org/10.3390/s100504180
Nirschl, M. ; Rantala, Arto ; Tukkiniemi, Kari ; Auer, Sanna ; Hellgren, A.-C. ; Pitzer, D. ; Schreiter, M. ; Vikholm-Lundin, Inger. / CMOS-integrated film bulk acoustic resonators for label-free biosensing. In: Sensors. 2010 ; Vol. 10, No. 5. pp. 4180-4193.
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Nirschl, M, Rantala, A, Tukkiniemi, K, Auer, S, Hellgren, A-C, Pitzer, D, Schreiter, M & Vikholm-Lundin, I 2010, 'CMOS-integrated film bulk acoustic resonators for label-free biosensing', Sensors, vol. 10, no. 5, pp. 4180-4193. https://doi.org/10.3390/s100504180

CMOS-integrated film bulk acoustic resonators for label-free biosensing. / Nirschl, M. (Corresponding Author); Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, Inger.

In: Sensors, Vol. 10, No. 5, 2010, p. 4180-4193.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - CMOS-integrated film bulk acoustic resonators for label-free biosensing

AU - Nirschl, M.

AU - Rantala, Arto

AU - Tukkiniemi, Kari

AU - Auer, Sanna

AU - Hellgren, A.-C.

AU - Pitzer, D.

AU - Schreiter, M.

AU - Vikholm-Lundin, Inger

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AB - The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

KW - Biomolecular interaction analysis

KW - Biosensor

KW - CMOS

KW - DNA

KW - FBAR

KW - Film bulk acoustic resonator

KW - Label-free

KW - Thickness shear mode

KW - TSM

U2 - 10.3390/s100504180

DO - 10.3390/s100504180

M3 - Article

VL - 10

SP - 4180

EP - 4193

JO - Sensors

JF - Sensors

SN - 1424-8220

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