The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
- Biomolecular interaction analysis
- Film bulk acoustic resonator
- Thickness shear mode
Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A-C., Pitzer, D., Schreiter, M., & Vikholm-Lundin, I. (2010). CMOS-integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10(5), 4180-4193. https://doi.org/10.3390/s100504180