CMOS-integrated film bulk acoustic resonators for label-free biosensing

M. Nirschl (Corresponding Author), Arto Rantala, Kari Tukkiniemi, Sanna Auer, A.-C. Hellgren, D. Pitzer, M. Schreiter, Inger Vikholm-Lundin

    Research output: Contribution to journalArticleScientificpeer-review

    50 Citations (Scopus)

    Abstract

    The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
    Original languageEnglish
    Pages (from-to)4180-4193
    Number of pages14
    JournalSensors
    Volume10
    Issue number5
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Quartz Crystal Microbalance Techniques
    Acoustic resonators
    Quartz crystal microbalances
    quartz crystals
    Acoustics
    microbalances
    Labels
    CMOS
    resonators
    Throughput
    Surface Plasmon Resonance
    acoustics
    sensors
    Sensors
    Surface plasmon resonance
    Biosensing Techniques
    bioinstrumentation
    surface plasmon resonance
    Biosensors
    DNA

    Keywords

    • Biomolecular interaction analysis
    • Biosensor
    • CMOS
    • DNA
    • FBAR
    • Film bulk acoustic resonator
    • Label-free
    • Thickness shear mode
    • TSM

    Cite this

    Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A-C., Pitzer, D., ... Vikholm-Lundin, I. (2010). CMOS-integrated film bulk acoustic resonators for label-free biosensing. Sensors, 10(5), 4180-4193. https://doi.org/10.3390/s100504180
    Nirschl, M. ; Rantala, Arto ; Tukkiniemi, Kari ; Auer, Sanna ; Hellgren, A.-C. ; Pitzer, D. ; Schreiter, M. ; Vikholm-Lundin, Inger. / CMOS-integrated film bulk acoustic resonators for label-free biosensing. In: Sensors. 2010 ; Vol. 10, No. 5. pp. 4180-4193.
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    Nirschl, M, Rantala, A, Tukkiniemi, K, Auer, S, Hellgren, A-C, Pitzer, D, Schreiter, M & Vikholm-Lundin, I 2010, 'CMOS-integrated film bulk acoustic resonators for label-free biosensing', Sensors, vol. 10, no. 5, pp. 4180-4193. https://doi.org/10.3390/s100504180

    CMOS-integrated film bulk acoustic resonators for label-free biosensing. / Nirschl, M. (Corresponding Author); Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, Inger.

    In: Sensors, Vol. 10, No. 5, 2010, p. 4180-4193.

    Research output: Contribution to journalArticleScientificpeer-review

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    T1 - CMOS-integrated film bulk acoustic resonators for label-free biosensing

    AU - Nirschl, M.

    AU - Rantala, Arto

    AU - Tukkiniemi, Kari

    AU - Auer, Sanna

    AU - Hellgren, A.-C.

    AU - Pitzer, D.

    AU - Schreiter, M.

    AU - Vikholm-Lundin, Inger

    PY - 2010

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    AB - The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

    KW - Biomolecular interaction analysis

    KW - Biosensor

    KW - CMOS

    KW - DNA

    KW - FBAR

    KW - Film bulk acoustic resonator

    KW - Label-free

    KW - Thickness shear mode

    KW - TSM

    U2 - 10.3390/s100504180

    DO - 10.3390/s100504180

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    SN - 1424-8220

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