CMOS-integrated film bulk acoustic resonators for label-free biosensing

M. Nirschl (Corresponding Author), Arto Rantala, Kari Tukkiniemi, Sanna Auer, A.-C. Hellgren, D. Pitzer, M. Schreiter, Inger Vikholm-Lundin

    Research output: Contribution to journalArticleScientificpeer-review

    60 Citations (Scopus)


    The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
    Original languageEnglish
    Pages (from-to)4180-4193
    Number of pages14
    Issue number5
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed


    • Biomolecular interaction analysis
    • Biosensor
    • CMOS
    • DNA
    • FBAR
    • Film bulk acoustic resonator
    • Label-free
    • Thickness shear mode
    • TSM


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