CMOS-integrated film bulk acoustic resonators for label-free biosensing

Martin Nirschl; Arto Rantala; Kari Tukkiniemi; Sanna Auer; Ann-Charlotte Hellgren; Dana Pitzer; Matthias Schreiter; Inger Vikholm-Lundin

doi:10.3390/s100504180

CMOS-integrated film bulk acoustic resonators for label-free biosensing

Martin Nirschl^*
, Arto Rantala
, Kari Tukkiniemi
, Sanna Auer
, Ann-Charlotte Hellgren
, Dana Pitzer
, Matthias Schreiter
, Inger Vikholm-Lundin

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

64 Citations (Scopus)

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

Original language	English
Pages (from-to)	4180-4193
Journal	Sensors
Volume	10
Issue number	5
DOIs	https://doi.org/10.3390/s100504180
Publication status	Published - 2010
MoE publication type	A1 Journal article-refereed

Keywords

Biomolecular interaction analysis
Biosensor
CMOS
DNA
FBAR
Film bulk acoustic resonator
Label-free
Thickness shear mode
TSM

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10.3390/s100504180

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abstract = "The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.",

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T1 - CMOS-integrated film bulk acoustic resonators for label-free biosensing

AU - Nirschl, Martin

AU - Rantala, Arto

AU - Tukkiniemi, Kari

AU - Auer, Sanna

AU - Hellgren, Ann-Charlotte

AU - Pitzer, Dana

AU - Schreiter, Matthias

AU - Vikholm-Lundin, Inger

PY - 2010

Y1 - 2010

N2 - The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

AB - The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

KW - Biomolecular interaction analysis

KW - Biosensor

KW - CMOS

KW - DNA

KW - FBAR

KW - Film bulk acoustic resonator

KW - Label-free

KW - Thickness shear mode

KW - TSM

U2 - 10.3390/s100504180

DO - 10.3390/s100504180

M3 - Article

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JO - Sensors

JF - Sensors

IS - 5

ER -

CMOS-integrated film bulk acoustic resonators for label-free biosensing

Abstract

Keywords

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