CMOS process development at VTT

Martti Blomberg; Gyözö Drozdy; Sami Franssila; Merja Hotti; Teija Häkkinen; Ari Häärä; Kari Leinonen; Timo Murto; Markku Orpana

CMOS process development at VTT

Martti Blomberg, Gyözö Drozdy, Sami Franssila, Merja Hotti, Teija Häkkinen, Ari Häärä, Kari Leinonen, Timo Murto, Markku Orpana

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Pages	93-96
Publication status	Published - 1988
MoE publication type	Not Eligible
Event	13th Nordic Semiconductor Meeting - Saltsjöbaden, Stockholm, Sweden Duration: 5 Jun 1988 → 8 Jun 1988

Seminar

Seminar	13th Nordic Semiconductor Meeting
Country/Territory	Sweden
City	Stockholm
Period	5/06/88 → 8/06/88

Cite this

@conference{da6305ba442545ad8bf218176dce7454,

title = "CMOS process development at VTT",

author = "Martti Blomberg and Gy{\"o}z{\"o} Drozdy and Sami Franssila and Merja Hotti and Teija H{\"a}kkinen and Ari H{\"a}{\"a}r{\"a} and Kari Leinonen and Timo Murto and Markku Orpana",

year = "1988",

language = "English",

pages = "93--96",

note = "13th Nordic Semiconductor Meeting ; Conference date: 05-06-1988 Through 08-06-1988",

}