CMOS process development at VTT

Martti Blomberg, Gyözö Drozdy, Sami Franssila, Merja Hotti, Teija Häkkinen, Ari Häärä, Kari Leinonen, Timo Murto, Markku Orpana

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Pages93-96
    Publication statusPublished - 1988
    MoE publication typeNot Eligible
    Event13th Nordic Semiconductor Meeting - Saltsjöbaden, Stockholm, Sweden
    Duration: 5 Jun 19888 Jun 1988

    Seminar

    Seminar13th Nordic Semiconductor Meeting
    CountrySweden
    CityStockholm
    Period5/06/888/06/88

    Cite this

    Blomberg, M., Drozdy, G., Franssila, S., Hotti, M., Häkkinen, T., Häärä, A., Leinonen, K., Murto, T., & Orpana, M. (1988). CMOS process development at VTT. 93-96. Paper presented at 13th Nordic Semiconductor Meeting, Stockholm, Sweden.