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Cold ion-cutting of hydrogen implanted Si
Kimmo Henttinen (Corresponding Author), Tommi Suni, Arto Nurmela, Ilkka Suni (Corresponding Author), S. Lau, T. Höchbauer, M. Nastasi, V.-M. Airaksinen
Research output: Contribution to journal › Article › Scientific › peer-review
22
Citations
(Scopus)