Combined ion micro probe and SEM analysis of strongly non uniform deposits in fusion devices

I. Bykov (Corresponding Author), H. Bergsåker, P. Petersson, J. Likonen, G. Possnert, A. Widdowson

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)


Conventional ion beam analysis (IBA) of deposited layers from fusion devices may have insufficient accuracy due to strongly uneven appearance of the layers. Surface roughness and spatial variation of the matrix composition make interpretation of broad beam spectra complex and non obvious. We discuss complications of applied IBA arising for fusion-relevant surfaces and demonstrate how quantification can be improved by employing micro IBA methods. The analysis is bound to pre-defined regions on the sample surface and can be extended by employing beams of several types, scanning electron microscopy (SEM) and stereo SEM techniques.

Original languageEnglish
Pages (from-to)19-28
Number of pages10
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 1 Jan 2015
MoE publication typeNot Eligible



  • Deuterium retention
  • Ion micro probe
  • Micro NRA
  • PIXE
  • Plasma-facing components

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