TY - JOUR
T1 - Comparison of anodization spectroscopy with SIMS and RBS measurements for the characterization of Nb/AlAlOx/NB Josephson junction structures
AU - Saarilahti, Jaakko
AU - Likonen, Jari
AU - Grönberg, Leif
N1 -
Project code: PUOT9124
PY - 1993/6/2
Y1 - 1993/6/2
N2 - The thin tunneling barrier in a Nb/AlAlOx/Nb was characterized by anodization spectroscopy, SIMS and RBS. From the anodization spectroscopy we can get the film thickness from the voltage span and, most importantly, also the sharpness of the Nb/AlOx and Al/Nb interfaces around the tunneling barrier. Comparison of the anodization profiles with SIMS depth profiles and RBS spectra shows that the anodization spectroscopy can be used to characterize the junction quality.
AB - The thin tunneling barrier in a Nb/AlAlOx/Nb was characterized by anodization spectroscopy, SIMS and RBS. From the anodization spectroscopy we can get the film thickness from the voltage span and, most importantly, also the sharpness of the Nb/AlOx and Al/Nb interfaces around the tunneling barrier. Comparison of the anodization profiles with SIMS depth profiles and RBS spectra shows that the anodization spectroscopy can be used to characterize the junction quality.
KW - Josephson junction
UR - http://www.scopus.com/inward/record.url?scp=50749132174&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(93)95392-I
DO - 10.1016/0168-583X(93)95392-I
M3 - Article
AN - SCOPUS:50749132174
SN - 0168-583X
VL - 79
SP - 474
EP - 477
JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
IS - 1-4
ER -