Comparison of DMTL Phase Shifter Designs

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Abstract

Three different distributed-MEMS-transmission-line (DMTL) phase shifter design approaches are compared for 35 GHz applications able to shift the full 360° phase shift. A novel mixed analog and digital phase shifter is realized in VTT MEMS fabrication process with aluminum metals. The phase shifter design is characterized up to 110 GHz and the insertion loss is 3.8 dB at 35 GHz resulting in a figure of merit of 87°/dB.
Original languageEnglish
Title of host publicationProceedigns of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
Pages37-40
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
Event10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 - Trento, Italy
Duration: 6 Jul 20098 Jul 2009

Conference

Conference10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
Abbreviated titleMEMSWAVE 2009
CountryItaly
CityTrento
Period6/07/098/07/09

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Keywords

  • RF MEMS
  • DMTL
  • phase shifter

Cite this

Saijets, J., Rantakari, P., Tuohiniemi, M., & Vähä-Heikkilä, T. (2009). Comparison of DMTL Phase Shifter Designs. In Proceedigns of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 (pp. 37-40)