Abstract
Three different distributed-MEMS-transmission-line (DMTL)
phase shifter design approaches are compared for 35 GHz
applications able to shift the full 360° phase shift. A
novel mixed analog and digital phase shifter is realized
in VTT MEMS fabrication process with aluminum metals.
The phase shifter design is characterized up to 110 GHz
and the insertion loss is 3.8 dB at 35 GHz resulting in a
figure of merit of 87°/dB.
Original language | English |
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Title of host publication | Proceedigns of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 |
Pages | 37-40 |
Publication status | Published - 2009 |
MoE publication type | A4 Article in a conference publication |
Event | 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 - Trento, Italy Duration: 6 Jul 2009 → 8 Jul 2009 |
Conference
Conference | 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 |
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Abbreviated title | MEMSWAVE 2009 |
Country/Territory | Italy |
City | Trento |
Period | 6/07/09 → 8/07/09 |
Keywords
- RF MEMS
- DMTL
- phase shifter