Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process

Riikka Puurunen

Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process

Riikka Puurunen

VTT Technical Research Centre of Finland

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2016
Event	16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland Duration: 24 Jul 2016 → 27 Jul 2016

Conference

Conference	16th International Conference on Atomic Layer Deposition, ALD 2016
Abbreviated title	ALD 2016
Country/Territory	Ireland
City	Dublin
Period	24/07/16 → 27/07/16

Cite this

@conference{7ff80708621d40a58d2fdd92b20e18d3,

title = "Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process",

author = "Riikka Puurunen",

note = "Project code: 102086 ; 16th International Conference on Atomic Layer Deposition, ALD 2016, ALD 2016 ; Conference date: 24-07-2016 Through 27-07-2016",

year = "2016",

language = "English",

}