Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process

Riikka Puurunen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2016
Event16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland
Duration: 24 Jul 201627 Jul 2016

Conference

Conference16th International Conference on Atomic Layer Deposition, ALD 2016
Abbreviated titleALD 2016
CountryIreland
CityDublin
Period24/07/1627/07/16

Cite this

Puurunen, R. (2016). Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process. Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.
Puurunen, Riikka. / Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process. Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.
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title = "Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process",
author = "Riikka Puurunen",
note = "Project code: 102086 ; 16th International Conference on Atomic Layer Deposition, ALD 2016, ALD 2016 ; Conference date: 24-07-2016 Through 27-07-2016",
year = "2016",
language = "English",

}

Puurunen, R 2016, 'Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process' Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland, 24/07/16 - 27/07/16, .

Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process. / Puurunen, Riikka.

2016. Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process

AU - Puurunen, Riikka

N1 - Project code: 102086

PY - 2016

Y1 - 2016

M3 - Conference article

ER -

Puurunen R. Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process. 2016. Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.