Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process

Riikka Puurunen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2016
Event16th International Conference on Atomic Layer Deposition, ALD 2016 - Dublin, Ireland
Duration: 24 Jul 201627 Jul 2016

Conference

Conference16th International Conference on Atomic Layer Deposition, ALD 2016
Abbreviated titleALD 2016
CountryIreland
CityDublin
Period24/07/1627/07/16

Cite this

Puurunen, R. (2016). Comparison of interpretations on the surface chemistry of the trimethylaluminiumwater ALD process. Paper presented at 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland.