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Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
- Perttu Sippola
- , Alexander Pyymäki Perros
- , Oili Ylivaara
- , Helena Ronkainen
- , Jaakko Julin
- , Xuwen Liu
- , Timo Sajavaara
- , Jarkko Etula
- , Harri Lipsanen
- , Riikka L. Puurunen
Research output: Contribution to journal › Article › Scientific › peer-review
13
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(Scopus)