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Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

  • Perttu Sippola
  • , Alexander Pyymäki Perros
  • , Oili Ylivaara
  • , Helena Ronkainen
  • , Jaakko Julin
  • , Xuwen Liu
  • , Timo Sajavaara
  • , Jarkko Etula
  • , Harri Lipsanen
  • , Riikka L. Puurunen
    • Aalto University
    • University of Jyväskylä
    • VTT (former employee or external)
    • Nanovate Oy
    • Helmholtz Centre Dresden-Rossendorf (HZDR)

    Research output: Contribution to journal › Article › Scientific › peer-review

    13   Link opens in a new tab Citations (Scopus)

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