Abstract
The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.
Original language | English |
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Title of host publication | 2018 11th Global Symposium on Millimeter Waves, GSMM 2018 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
ISBN (Print) | 978-1-5386-4584-0 |
DOIs | |
Publication status | Published - 17 Aug 2018 |
MoE publication type | Not Eligible |
Event | 11th Global Symposium on Millimeter Waves, GSMM 2018 - Boulder, United States Duration: 22 May 2018 → 24 May 2018 |
Conference
Conference | 11th Global Symposium on Millimeter Waves, GSMM 2018 |
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Country/Territory | United States |
City | Boulder |
Period | 22/05/18 → 24/05/18 |
Keywords
- Dielectric waveguide
- Integration
- Metallic waveguide
- Micromachining
- THz propagation
- Waveguide
- OtaNano