Comparison of micromachined dielectric and metallic waveguides for THz applications

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    Abstract

    The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.

    Original languageEnglish
    Title of host publication2018 11th Global Symposium on Millimeter Waves, GSMM 2018
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)978-1-5386-4584-0
    DOIs
    Publication statusPublished - 17 Aug 2018
    MoE publication typeNot Eligible
    Event11th Global Symposium on Millimeter Waves, GSMM 2018 - Boulder, United States
    Duration: 22 May 201824 May 2018

    Conference

    Conference11th Global Symposium on Millimeter Waves, GSMM 2018
    CountryUnited States
    CityBoulder
    Period22/05/1824/05/18

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    Keywords

    • Dielectric waveguide
    • Integration
    • Metallic waveguide
    • Micromachining
    • THz propagation
    • Waveguide
    • OtaNano

    Cite this

    Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J., & Ermolov, V. (2018). Comparison of micromachined dielectric and metallic waveguides for THz applications. In 2018 11th Global Symposium on Millimeter Waves, GSMM 2018 [8439194] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/GSMM.2018.8439194