Comparison of micromachined dielectric and metallic waveguides for THz applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.

    Original languageEnglish
    Title of host publication2018 11th Global Symposium on Millimeter Waves, GSMM 2018
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)978-1-5386-4584-0
    DOIs
    Publication statusPublished - 17 Aug 2018
    MoE publication typeNot Eligible
    Event11th Global Symposium on Millimeter Waves, GSMM 2018 - Boulder, United States
    Duration: 22 May 201824 May 2018

    Conference

    Conference11th Global Symposium on Millimeter Waves, GSMM 2018
    CountryUnited States
    CityBoulder
    Period22/05/1824/05/18

    Fingerprint

    dielectric waveguides
    Waveguides
    waveguides
    Dielectric waveguides
    low frequencies
    Silicon
    silicon
    Dielectric losses
    dielectric loss
    slots
    metal surfaces
    surface roughness
    Surface roughness
    Fabrication
    fabrication
    Metals
    simulation

    Keywords

    • Dielectric waveguide
    • Integration
    • Metallic waveguide
    • Micromachining
    • THz propagation
    • Waveguide

    Cite this

    Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J., & Ermolov, V. (2018). Comparison of micromachined dielectric and metallic waveguides for THz applications. In 2018 11th Global Symposium on Millimeter Waves, GSMM 2018 [8439194] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/GSMM.2018.8439194
    @inproceedings{b20db4fb1a5f40eb897107ded10070e4,
    title = "Comparison of micromachined dielectric and metallic waveguides for THz applications",
    abstract = "The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.",
    keywords = "Dielectric waveguide, Integration, Metallic waveguide, Micromachining, THz propagation, Waveguide",
    author = "Pekka Pursula and Matteo Cherchi and Antti Lamminen and Mikko Kantanen and Jaakko Saarilahti and Vladimir Ermolov",
    year = "2018",
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    language = "English",
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    Pursula, P, Cherchi, M, Lamminen, A, Kantanen, M, Saarilahti, J & Ermolov, V 2018, Comparison of micromachined dielectric and metallic waveguides for THz applications. in 2018 11th Global Symposium on Millimeter Waves, GSMM 2018., 8439194, IEEE Institute of Electrical and Electronic Engineers , 11th Global Symposium on Millimeter Waves, GSMM 2018, Boulder, United States, 22/05/18. https://doi.org/10.1109/GSMM.2018.8439194

    Comparison of micromachined dielectric and metallic waveguides for THz applications. / Pursula, Pekka; Cherchi, Matteo; Lamminen, Antti; Kantanen, Mikko; Saarilahti, Jaakko; Ermolov, Vladimir.

    2018 11th Global Symposium on Millimeter Waves, GSMM 2018. IEEE Institute of Electrical and Electronic Engineers , 2018. 8439194.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    N2 - The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.

    AB - The paper considers micromachined dielectric and metallic waveguides for THz applications. Analytical analysis and simulation of losses for ideal structures are provided. Effect of fabrication nonidealities, such as surface roughness is also considered. In dielectric waveguide, the dielectric losses are the main loss mechanism, and Silicon tan8 is low above 1 THz, but increases rapidly at lower frequencies. The loss in metallic waveguides increases with increasing frequency. For ideal structures, the Silicon dielectric slot waveguide shows lower loss over 1.2 THz than the metallic waveguide. The effect of rough metal surface in the metallic waveguide increases the loss, making the dielectric waveguide interesting at even lower frequencies.

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    KW - Metallic waveguide

    KW - Micromachining

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    Pursula P, Cherchi M, Lamminen A, Kantanen M, Saarilahti J, Ermolov V. Comparison of micromachined dielectric and metallic waveguides for THz applications. In 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. IEEE Institute of Electrical and Electronic Engineers . 2018. 8439194 https://doi.org/10.1109/GSMM.2018.8439194