Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2007
    MoE publication typeNot Eligible
    Event33rd International Conference on Micro- and Nano Engineering, MNE 2007 - Copenhagen, Denmark
    Duration: 23 Sep 200726 Sep 2007

    Conference

    Conference33rd International Conference on Micro- and Nano Engineering, MNE 2007
    Country/TerritoryDenmark
    CityCopenhagen
    Period23/09/0726/09/07

    Keywords

    • nanoimprint, step and stamp imprint, UV nanoimprint

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