Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2007
MoE publication typeNot Eligible
Event33rd International Conference on Micro- and Nano Engineering, MNE 2007 - Copenhagen, Denmark
Duration: 23 Sep 200726 Sep 2007

Conference

Conference33rd International Conference on Micro- and Nano Engineering, MNE 2007
CountryDenmark
CityCopenhagen
Period23/09/0726/09/07

Keywords

  • nanoimprint, step and stamp imprint, UV nanoimprint

Cite this

Haatainen, T., Majander, P., Mäkelä, T., & Ahopelto, J. (2007). Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.