Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2007
MoE publication type	Not Eligible
Event	33rd International Conference on Micro- and Nano Engineering, MNE 2007 - Copenhagen, Denmark Duration: 23 Sep 2007 → 26 Sep 2007

Conference	33rd International Conference on Micro- and Nano Engineering, MNE 2007
Country	Denmark
City	Copenhagen
Period	23/09/07 → 26/09/07

Cite this

@conference{0092e28a83904de38e102788b7e0531d,

title = "Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper",

keywords = "nanoimprint, step and stamp imprint, UV nanoimprint",

author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",

note = "Project code: 6011; 33rd International Conference on Micro- and Nano Engineering, MNE 2007 ; Conference date: 23-09-2007 Through 26-09-2007",

year = "2007",

language = "English",

}

2007. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.

Research output: Contribution to conference › Conference article › Scientific › peer-review

TY - CONF

T1 - Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

N1 - Project code: 6011

PY - 2007

Y1 - 2007

KW - nanoimprint, step and stamp imprint, UV nanoimprint

M3 - Conference article

T2 - 33rd International Conference on Micro- and Nano Engineering, MNE 2007

Y2 - 23 September 2007 through 26 September 2007

ER -