Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original languageEnglish
Publication statusPublished - 2007
MoE publication typeNot Eligible
Event33rd International Conference on Micro- and Nano Engineering, MNE 2007 - Copenhagen, Denmark
Duration: 23 Sep 2007 → 26 Sep 2007

Conference

Conference33rd International Conference on Micro- and Nano Engineering, MNE 2007
CountryDenmark
CityCopenhagen
Period23/09/07 → 26/09/07

Keywords

  • nanoimprint, step and stamp imprint, UV nanoimprint

Cite this

Haatainen, T., Majander, P., Mäkelä, T., & Ahopelto, J. (2007). Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.
Haatainen, Tomi ; Majander, Päivi ; Mäkelä, Tapio ; Ahopelto, Jouni. / Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.
@conference{0092e28a83904de38e102788b7e0531d,
title = "Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper",
keywords = "nanoimprint, step and stamp imprint, UV nanoimprint",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",
note = "Project code: 6011; 33rd International Conference on Micro- and Nano Engineering, MNE 2007 ; Conference date: 23-09-2007 Through 26-09-2007",
year = "2007",
language = "English",

}

Haatainen, T, Majander, P, Mäkelä, T & Ahopelto, J 2007, 'Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper', Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark, 23/09/07 - 26/09/07.

Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper. / Haatainen, Tomi; Majander, Päivi; Mäkelä, Tapio; Ahopelto, Jouni.

2007. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.

Research output: Contribution to conference › Conference article › Scientific › peer-review

TY - CONF

T1 - Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

N1 - Project code: 6011

PY - 2007

Y1 - 2007

KW - nanoimprint, step and stamp imprint, UV nanoimprint

M3 - Conference article

ER -

Haatainen T, Majander P, Mäkelä T, Ahopelto J. Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper. 2007. Paper presented at 33rd International Conference on Micro- and Nano Engineering, MNE 2007, Copenhagen, Denmark.