@conference{0092e28a83904de38e102788b7e0531d,
title = "Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper",
keywords = "nanoimprint, step and stamp imprint, UV nanoimprint",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",
note = "Project code: 6011; 33rd International Conference on Micro- and Nano Engineering, MNE 2007 ; Conference date: 23-09-2007 Through 26-09-2007",
year = "2007",
language = "English",
}