Comparison of the performance of the next generation of optical interferometers

Marco Pisani, Andrew Yacoot, Petr Balling, Nicola Bancone, Cengiz Birlikseven, Mehmet Celik, Jens Flügge, Ramiz Hamid, Paul Köchert, Petr Kren, Ulrich Kuetgens, Antti Lassila, Gian Bartolo Picotto, Ersoy Sahin, Jeremias Seppä, Matthew Tedaldi, Christoph Weichert

    Research output: Contribution to journalArticleScientificpeer-review

    73 Citations (Scopus)

    Abstract

    Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.
    Original languageEnglish
    Pages (from-to)455-467
    Number of pages12
    JournalMetrologia
    Volume49
    Issue number4
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • interferometers
    • metrology

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