Comparison of the performance of the next generation of optical interferometers

Marco Pisani; Andrew Yacoot; Petr Balling; Nicola Bancone; Cengiz Birlikseven; Mehmet Çelik; Jens Flügge; Ramiz Hamid; Paul Köchert; Petr Kren; Ulrich Kuetgens; Antti Lassila; Gian Bartolo Picotto; Ersoy Şahin; Jeremias Seppä; Matthew Tedaldi; Christoph Weichert

doi:10.1088/0026-1394/49/4/455

Comparison of the performance of the next generation of optical interferometers

Marco Pisani, Andrew Yacoot, Petr Balling, Nicola Bancone, Cengiz Birlikseven, Mehmet Çelik, Jens Flügge, Ramiz Hamid, Paul Köchert, Petr Kren, Ulrich Kuetgens, Antti Lassila, Gian Bartolo Picotto, Ersoy Şahin, Jeremias Seppä, Matthew Tedaldi, Christoph Weichert

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

Original language	English
Pages (from-to)	455-467
Journal	Metrologia
Volume	49
Issue number	4
DOIs	https://doi.org/10.1088/0026-1394/49/4/455
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Keywords

interferometers
metrology

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10.1088/0026-1394/49/4/455

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Pisani, M., Yacoot, A., Balling, P., Bancone, N., Birlikseven, C., Çelik, M., Flügge, J., Hamid, R., Köchert, P., Kren, P., Kuetgens, U., Lassila, A., Picotto, G. B., Şahin, E., Seppä, J., Tedaldi, M., & Weichert, C. (2012). Comparison of the performance of the next generation of optical interferometers. Metrologia, 49(4), 455-467. https://doi.org/10.1088/0026-1394/49/4/455

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title = "Comparison of the performance of the next generation of optical interferometers",

abstract = "Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.",

keywords = "interferometers, metrology",

author = "Marco Pisani and Andrew Yacoot and Petr Balling and Nicola Bancone and Cengiz Birlikseven and Mehmet {\c C}elik and Jens Fl{\"u}gge and Ramiz Hamid and Paul K{\"o}chert and Petr Kren and Ulrich Kuetgens and Antti Lassila and Picotto, {Gian Bartolo} and Ersoy {\c S}ahin and Jeremias Sepp{\"a} and Matthew Tedaldi and Christoph Weichert",

year = "2012",

doi = "10.1088/0026-1394/49/4/455",

language = "English",

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pages = "455--467",

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Pisani, M, Yacoot, A, Balling, P, Bancone, N, Birlikseven, C, Çelik, M, Flügge, J, Hamid, R, Köchert, P, Kren, P, Kuetgens, U, Lassila, A, Picotto, GB, Şahin, E, Seppä, J, Tedaldi, M & Weichert, C 2012, 'Comparison of the performance of the next generation of optical interferometers', Metrologia, vol. 49, no. 4, pp. 455-467. https://doi.org/10.1088/0026-1394/49/4/455

TY - JOUR

T1 - Comparison of the performance of the next generation of optical interferometers

AU - Pisani, Marco

AU - Yacoot, Andrew

AU - Balling, Petr

AU - Bancone, Nicola

AU - Birlikseven, Cengiz

AU - Çelik, Mehmet

AU - Flügge, Jens

AU - Hamid, Ramiz

AU - Köchert, Paul

AU - Kren, Petr

AU - Kuetgens, Ulrich

AU - Lassila, Antti

AU - Picotto, Gian Bartolo

AU - Şahin, Ersoy

AU - Seppä, Jeremias

AU - Tedaldi, Matthew

AU - Weichert, Christoph

PY - 2012

Y1 - 2012

N2 - Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

AB - Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

KW - interferometers

KW - metrology

U2 - 10.1088/0026-1394/49/4/455

DO - 10.1088/0026-1394/49/4/455

M3 - Article

SN - 0026-1394

VL - 49

SP - 455

EP - 467

JO - Metrologia

JF - Metrologia

IS - 4

ER -

Comparison of the performance of the next generation of optical interferometers

Abstract

Keywords

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