Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers

Tobias Höchbauer (Corresponding Author), A. Misra, M. Nastasi, Kimmo Henttinen, T. Suni, Ilkka Suni, S.S. Lau, W. Ensinger

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers'. Together they form a unique fingerprint.

Keyphrases

Engineering

INIS

Physics

Material Science

Chemistry