Composition of anodiacally grown SiO

Jouni Ahopelto, Arto Lietoila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication11th Nordic Semiconductor Meeting
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages221-224
ISBN (Print)951-38-2066-1
Publication statusPublished - 1984
MoE publication typeA4 Article in a conference publication
Event11th Nordic Semiconductor Meeting - Espoo, Finland
Duration: 11 Jun 198413 Jun 1984

Publication series

NameVTT Symposium
PublisherVTT
Number45
ISSN (Print)0357-9387
ISSN (Electronic)1455-0873

Conference

Conference11th Nordic Semiconductor Meeting
CountryFinland
CityEspoo
Period11/06/8413/06/84

Cite this

Ahopelto, J., & Lietoila, A. (1984). Composition of anodiacally grown SiO. In 11th Nordic Semiconductor Meeting (pp. 221-224). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 45
Ahopelto, Jouni ; Lietoila, Arto. / Composition of anodiacally grown SiO. 11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. pp. 221-224 (VTT Symposium; No. 45).
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title = "Composition of anodiacally grown SiO",
author = "Jouni Ahopelto and Arto Lietoila",
year = "1984",
language = "English",
isbn = "951-38-2066-1",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "45",
pages = "221--224",
booktitle = "11th Nordic Semiconductor Meeting",
address = "Finland",

}

Ahopelto, J & Lietoila, A 1984, Composition of anodiacally grown SiO. in 11th Nordic Semiconductor Meeting. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 45, pp. 221-224, 11th Nordic Semiconductor Meeting, Espoo, Finland, 11/06/84.

Composition of anodiacally grown SiO. / Ahopelto, Jouni; Lietoila, Arto.

11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. p. 221-224 (VTT Symposium; No. 45).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Composition of anodiacally grown SiO

AU - Ahopelto, Jouni

AU - Lietoila, Arto

PY - 1984

Y1 - 1984

M3 - Conference article in proceedings

SN - 951-38-2066-1

T3 - VTT Symposium

SP - 221

EP - 224

BT - 11th Nordic Semiconductor Meeting

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Ahopelto J, Lietoila A. Composition of anodiacally grown SiO. In 11th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland. 1984. p. 221-224. (VTT Symposium; No. 45).