Composition of anodiacally grown SiO

Jouni Ahopelto, Arto Lietoila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publication11th Nordic Semiconductor Meeting
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages221-224
    ISBN (Print)951-38-2066-1
    Publication statusPublished - 1984
    MoE publication typeA4 Article in a conference publication
    Event11th Nordic Semiconductor Meeting - Espoo, Finland
    Duration: 11 Jun 198413 Jun 1984

    Publication series

    SeriesVTT Symposium
    Number45
    ISSN0357-9387

    Conference

    Conference11th Nordic Semiconductor Meeting
    CountryFinland
    CityEspoo
    Period11/06/8413/06/84

    Cite this

    Ahopelto, J., & Lietoila, A. (1984). Composition of anodiacally grown SiO. In 11th Nordic Semiconductor Meeting (pp. 221-224). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 45
    Ahopelto, Jouni ; Lietoila, Arto. / Composition of anodiacally grown SiO. 11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. pp. 221-224 (VTT Symposium; No. 45).
    @inproceedings{c364f645474448dc9ba546f4402a8d46,
    title = "Composition of anodiacally grown SiO",
    author = "Jouni Ahopelto and Arto Lietoila",
    year = "1984",
    language = "English",
    isbn = "951-38-2066-1",
    series = "VTT Symposium",
    publisher = "VTT Technical Research Centre of Finland",
    number = "45",
    pages = "221--224",
    booktitle = "11th Nordic Semiconductor Meeting",
    address = "Finland",

    }

    Ahopelto, J & Lietoila, A 1984, Composition of anodiacally grown SiO. in 11th Nordic Semiconductor Meeting. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 45, pp. 221-224, 11th Nordic Semiconductor Meeting, Espoo, Finland, 11/06/84.

    Composition of anodiacally grown SiO. / Ahopelto, Jouni; Lietoila, Arto.

    11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. p. 221-224 (VTT Symposium; No. 45).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Composition of anodiacally grown SiO

    AU - Ahopelto, Jouni

    AU - Lietoila, Arto

    PY - 1984

    Y1 - 1984

    M3 - Conference article in proceedings

    SN - 951-38-2066-1

    T3 - VTT Symposium

    SP - 221

    EP - 224

    BT - 11th Nordic Semiconductor Meeting

    PB - VTT Technical Research Centre of Finland

    CY - Espoo

    ER -

    Ahopelto J, Lietoila A. Composition of anodiacally grown SiO. In 11th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland. 1984. p. 221-224. (VTT Symposium; No. 45).