Computer simulations of collision cascade anisotropies and sputtering: Dissertation

Research output: ThesisDissertation

Abstract

The binary collision lattice simulation code COSIPO has been used and developed further in order to investigate the sputtering of Cu atoms by Ar ions, collision cascade anisotropies, and the mechanisms behind these phenomena.The sputtering yields, angular distributions, energy distributions and space distributions of the original positions of the sputtered atoms have been calculated for various target structures.The effect of various model parameters in treating the binary collisions was studied.A combination of model parameters was found that relatively accurately reproduces experimental angular distributions and yields.A novel method to study collision cascade anisotropies and their relation to sputtering has been developed for the monocrystalline target.Calculations showed that the preferential ejection directions of sputtering are directly related to the anisotropies of cascade development.The contribution of collision sequence mechanisms to cascades and sputtering has been determined.The sensitivity of the angular distributions of the sputtered atoms on the near-surface structure and the Lehmann-Sigmund model have been studied by varying the thickness of a thin monocrystalline (amorphous) layer on top of the amorphous (monocrystalline) bulk.
Original languageEnglish
QualificationDoctor Degree
Awarding Institution
  • University of Helsinki
Supervisors/Advisors
  • Hautala, M., Supervisor, External person
Award date17 Aug 1990
Place of PublicationEspoo
Publisher
Print ISBNs951-38-3578-2
Publication statusPublished - 1990
MoE publication typeG5 Doctoral dissertation (article)

Fingerprint

cascades
computerized simulation
sputtering
anisotropy
collisions
angular distribution
atoms
ejection
energy distribution
sensitivity
ions
simulation

Keywords

  • computer simulation
  • binary collision approximation
  • collision cascade
  • anisotropies
  • sputtering

Cite this

Likonen, Jari. / Computer simulations of collision cascade anisotropies and sputtering : Dissertation. Espoo : VTT Technical Research Centre of Finland, 1990. 119 p.
@phdthesis{3f010929d3794c3fb39fcf28929d7c15,
title = "Computer simulations of collision cascade anisotropies and sputtering: Dissertation",
abstract = "The binary collision lattice simulation code COSIPO has been used and developed further in order to investigate the sputtering of Cu atoms by Ar ions, collision cascade anisotropies, and the mechanisms behind these phenomena.The sputtering yields, angular distributions, energy distributions and space distributions of the original positions of the sputtered atoms have been calculated for various target structures.The effect of various model parameters in treating the binary collisions was studied.A combination of model parameters was found that relatively accurately reproduces experimental angular distributions and yields.A novel method to study collision cascade anisotropies and their relation to sputtering has been developed for the monocrystalline target.Calculations showed that the preferential ejection directions of sputtering are directly related to the anisotropies of cascade development.The contribution of collision sequence mechanisms to cascades and sputtering has been determined.The sensitivity of the angular distributions of the sputtered atoms on the near-surface structure and the Lehmann-Sigmund model have been studied by varying the thickness of a thin monocrystalline (amorphous) layer on top of the amorphous (monocrystalline) bulk.",
keywords = "computer simulation, binary collision approximation, collision cascade, anisotropies, sputtering",
author = "Jari Likonen",
year = "1990",
language = "English",
isbn = "951-38-3578-2",
series = "Technical Research Centre of Finland. Publications",
publisher = "VTT Technical Research Centre of Finland",
number = "65",
address = "Finland",
school = "University of Helsinki",

}

Computer simulations of collision cascade anisotropies and sputtering : Dissertation. / Likonen, Jari.

Espoo : VTT Technical Research Centre of Finland, 1990. 119 p.

Research output: ThesisDissertation

TY - THES

T1 - Computer simulations of collision cascade anisotropies and sputtering

T2 - Dissertation

AU - Likonen, Jari

PY - 1990

Y1 - 1990

N2 - The binary collision lattice simulation code COSIPO has been used and developed further in order to investigate the sputtering of Cu atoms by Ar ions, collision cascade anisotropies, and the mechanisms behind these phenomena.The sputtering yields, angular distributions, energy distributions and space distributions of the original positions of the sputtered atoms have been calculated for various target structures.The effect of various model parameters in treating the binary collisions was studied.A combination of model parameters was found that relatively accurately reproduces experimental angular distributions and yields.A novel method to study collision cascade anisotropies and their relation to sputtering has been developed for the monocrystalline target.Calculations showed that the preferential ejection directions of sputtering are directly related to the anisotropies of cascade development.The contribution of collision sequence mechanisms to cascades and sputtering has been determined.The sensitivity of the angular distributions of the sputtered atoms on the near-surface structure and the Lehmann-Sigmund model have been studied by varying the thickness of a thin monocrystalline (amorphous) layer on top of the amorphous (monocrystalline) bulk.

AB - The binary collision lattice simulation code COSIPO has been used and developed further in order to investigate the sputtering of Cu atoms by Ar ions, collision cascade anisotropies, and the mechanisms behind these phenomena.The sputtering yields, angular distributions, energy distributions and space distributions of the original positions of the sputtered atoms have been calculated for various target structures.The effect of various model parameters in treating the binary collisions was studied.A combination of model parameters was found that relatively accurately reproduces experimental angular distributions and yields.A novel method to study collision cascade anisotropies and their relation to sputtering has been developed for the monocrystalline target.Calculations showed that the preferential ejection directions of sputtering are directly related to the anisotropies of cascade development.The contribution of collision sequence mechanisms to cascades and sputtering has been determined.The sensitivity of the angular distributions of the sputtered atoms on the near-surface structure and the Lehmann-Sigmund model have been studied by varying the thickness of a thin monocrystalline (amorphous) layer on top of the amorphous (monocrystalline) bulk.

KW - computer simulation

KW - binary collision approximation

KW - collision cascade

KW - anisotropies

KW - sputtering

M3 - Dissertation

SN - 951-38-3578-2

T3 - Technical Research Centre of Finland. Publications

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Likonen J. Computer simulations of collision cascade anisotropies and sputtering: Dissertation. Espoo: VTT Technical Research Centre of Finland, 1990. 119 p.