Abstract
The binary collision lattice simulation code COSIPO has been used and
developed further in order to investigate the sputtering of Cu atoms by Ar
ions, collision cascade anisotropies, and the mechanisms behind these
phenomena.The sputtering yields, angular distributions, energy distributions
and space distributions of the original positions of the sputtered atoms have
been calculated for various target structures.The effect of various model
parameters in treating the binary collisions was studied.A combination of
model parameters was found that relatively accurately reproduces experimental
angular distributions and yields.A novel method to study collision cascade
anisotropies and their relation to sputtering has been developed for the
monocrystalline target.Calculations showed that the preferential ejection
directions of sputtering are directly related to the anisotropies of cascade
development.The contribution of collision sequence mechanisms to cascades and
sputtering has been determined.The sensitivity of the angular distributions of
the sputtered atoms on the near-surface structure and the Lehmann-Sigmund
model have been studied by varying the thickness of a thin monocrystalline
(amorphous) layer on top of the amorphous (monocrystalline) bulk.
Original language | English |
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Qualification | Doctor Degree |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 17 Aug 1990 |
Place of Publication | Espoo |
Publisher | |
Print ISBNs | 951-38-3578-2 |
Publication status | Published - 1990 |
MoE publication type | G5 Doctoral dissertation (article) |
Keywords
- computer simulation
- binary collision approximation
- collision cascade
- anisotropies
- sputtering