Computer simulations on collision cascade anisotropics bombardment of single-crystalline Cu(100) by Ar ions

M. Hautala, Jari Likonen

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

The distributions of the recoil vector fluxes are studied using the binary collision lattice simulation code COSIPO in order to investigate the development of collision-cascade anisotropies in single-crystalline Cu. The vector fluxes are directly related to the angular distributions of sputtered particles. A single-crystal Cu(100) surface is used as the target, and is bombarded with normally incident 5-keV Ar ions. The results are discussed within the framework of focusing. The collision cascades are dominated by focusing along the (110) directions. Anisotropies in collision cascades turned out to be dependent on the interaction potential. The anisotropy in simulated angular distributions of sputtered particles is directly related to anisotropies in collision cascades.
Original languageEnglish
Pages (from-to)1759-1769
JournalPhysical Review B: Condensed Matter
Volume41
Issue number4
DOIs
Publication statusPublished - 1990
MoE publication typeA1 Journal article-refereed

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bombardment
cascades
Anisotropy
computerized simulation
Ions
Crystalline materials
collisions
Angular distribution
Computer simulation
anisotropy
ions
Fluxes
angular distribution
Single crystals
single crystals
simulation
interactions

Cite this

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title = "Computer simulations on collision cascade anisotropics bombardment of single-crystalline Cu(100) by Ar ions",
abstract = "The distributions of the recoil vector fluxes are studied using the binary collision lattice simulation code COSIPO in order to investigate the development of collision-cascade anisotropies in single-crystalline Cu. The vector fluxes are directly related to the angular distributions of sputtered particles. A single-crystal Cu(100) surface is used as the target, and is bombarded with normally incident 5-keV Ar ions. The results are discussed within the framework of focusing. The collision cascades are dominated by focusing along the (110) directions. Anisotropies in collision cascades turned out to be dependent on the interaction potential. The anisotropy in simulated angular distributions of sputtered particles is directly related to anisotropies in collision cascades.",
author = "M. Hautala and Jari Likonen",
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pages = "1759--1769",
journal = "Physical Review B",
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Computer simulations on collision cascade anisotropics bombardment of single-crystalline Cu(100) by Ar ions. / Hautala, M.; Likonen, Jari.

In: Physical Review B: Condensed Matter, Vol. 41, No. 4, 1990, p. 1759-1769.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Computer simulations on collision cascade anisotropics bombardment of single-crystalline Cu(100) by Ar ions

AU - Hautala, M.

AU - Likonen, Jari

PY - 1990

Y1 - 1990

N2 - The distributions of the recoil vector fluxes are studied using the binary collision lattice simulation code COSIPO in order to investigate the development of collision-cascade anisotropies in single-crystalline Cu. The vector fluxes are directly related to the angular distributions of sputtered particles. A single-crystal Cu(100) surface is used as the target, and is bombarded with normally incident 5-keV Ar ions. The results are discussed within the framework of focusing. The collision cascades are dominated by focusing along the (110) directions. Anisotropies in collision cascades turned out to be dependent on the interaction potential. The anisotropy in simulated angular distributions of sputtered particles is directly related to anisotropies in collision cascades.

AB - The distributions of the recoil vector fluxes are studied using the binary collision lattice simulation code COSIPO in order to investigate the development of collision-cascade anisotropies in single-crystalline Cu. The vector fluxes are directly related to the angular distributions of sputtered particles. A single-crystal Cu(100) surface is used as the target, and is bombarded with normally incident 5-keV Ar ions. The results are discussed within the framework of focusing. The collision cascades are dominated by focusing along the (110) directions. Anisotropies in collision cascades turned out to be dependent on the interaction potential. The anisotropy in simulated angular distributions of sputtered particles is directly related to anisotropies in collision cascades.

U2 - 10.1103/PhysRevB.41.1759

DO - 10.1103/PhysRevB.41.1759

M3 - Article

VL - 41

SP - 1759

EP - 1769

JO - Physical Review B

JF - Physical Review B

SN - 2469-9950

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