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Concentration dependent and independent Si diffusion in ion-implanted GaAs

  • T. Ahlgren
  • , Jari Likonen
  • , J. Slotte
  • , Jyrki Räisänen
  • , M. Rajatora
  • , J. Keinonen
  • University of Helsinki

Research output: Contribution to journal › Article › Scientific › peer-review

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