Concentration dependent and independent Si diffusion in ion-implanted GaAs

  • T. Ahlgren
  • , Jari Likonen
  • , J. Slotte
  • , Jyrki Räisänen
  • , M. Rajatora
  • , J. Keinonen

Research output: Contribution to journal › Article › Scientific › peer-review

56 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Concentration dependent and independent Si diffusion in ion-implanted GaAs'. Together they form a unique fingerprint.

Keyphrases

INIS

Engineering

Chemistry

Physics

Material Science

Biochemistry, Genetics and Molecular Biology