Abstract
Diffusion of deuterium in diamondlike carbon films has
been studied. The deuterium concentration profiles in
D+-ion-implanted films were measured by
secondary-ion-mass spectrometry. A model is proposed to
describe the experimental depth profiles. In this model
it was assumed that atomic D is the diffusing species,
whereas D in clusters is immobile. The results show that
the concentration of D clusters relative to the total D
concentration increases when the total D concentration
decreases, leading to a concentration-dependent
diffusion. The diffusion coefficients obtained for atomic
D resulted in an activation energy of 2.9±0.1 eV. The
solid solubility of D was observed to decrease with
increasing temperature.
Original language | English |
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Pages (from-to) | 9723-9726 |
Journal | Physical Review B: Condensed Matter and Materials Physics |
Volume | 57 |
Issue number | 16 |
DOIs | |
Publication status | Published - 1998 |
MoE publication type | A1 Journal article-refereed |