Diffusion of deuterium in diamondlike carbon films has been studied. The deuterium concentration profiles in D+-ion-implanted films were measured by secondary-ion-mass spectrometry. A model is proposed to describe the experimental depth profiles. In this model it was assumed that atomic D is the diffusing species, whereas D in clusters is immobile. The results show that the concentration of D clusters relative to the total D concentration increases when the total D concentration decreases, leading to a concentration-dependent diffusion. The diffusion coefficients obtained for atomic D resulted in an activation energy of 2.9±0.1 eV. The solid solubility of D was observed to decrease with increasing temperature.
|Physical Review B: Condensed Matter and Materials Physics
|Published - 1998
|MoE publication type
|A1 Journal article-refereed