Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 9723-9726 |
| Journal | Physical Review B: Condensed Matter and Materials Physics |
| Volume | 57 |
| Issue number | 16 |
| DOIs | |
| Publication status | Published - 1998 |
| MoE publication type | A1 Journal article-refereed |
Fingerprint
Cite this
}
Concentration-dependent deuterium diffusion in diamondlike carbon films. / Ahlgren, T. (Corresponding Author); Vainonen, E.; Likonen, Jari; Keinonen, J.
In: Physical Review B: Condensed Matter and Materials Physics, Vol. 57, No. 16, 1998, p. 9723-9726.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Concentration-dependent deuterium diffusion in diamondlike carbon films
AU - Ahlgren, T.
AU - Vainonen, E.
AU - Likonen, Jari
AU - Keinonen, J.
N1 - Project code: KET41481
PY - 1998
Y1 - 1998
N2 - Diffusion of deuterium in diamondlike carbon films has been studied. The deuterium concentration profiles in D+-ion-implanted films were measured by secondary-ion-mass spectrometry. A model is proposed to describe the experimental depth profiles. In this model it was assumed that atomic D is the diffusing species, whereas D in clusters is immobile. The results show that the concentration of D clusters relative to the total D concentration increases when the total D concentration decreases, leading to a concentration-dependent diffusion. The diffusion coefficients obtained for atomic D resulted in an activation energy of 2.9±0.1 eV. The solid solubility of D was observed to decrease with increasing temperature.
AB - Diffusion of deuterium in diamondlike carbon films has been studied. The deuterium concentration profiles in D+-ion-implanted films were measured by secondary-ion-mass spectrometry. A model is proposed to describe the experimental depth profiles. In this model it was assumed that atomic D is the diffusing species, whereas D in clusters is immobile. The results show that the concentration of D clusters relative to the total D concentration increases when the total D concentration decreases, leading to a concentration-dependent diffusion. The diffusion coefficients obtained for atomic D resulted in an activation energy of 2.9±0.1 eV. The solid solubility of D was observed to decrease with increasing temperature.
U2 - 10.1103/PhysRevB.57.9723
DO - 10.1103/PhysRevB.57.9723
M3 - Article
VL - 57
SP - 9723
EP - 9726
JO - Physical Review B
JF - Physical Review B
SN - 2469-9950
IS - 16
ER -