Concentration methods for the detection of trace elements in UPW

Simo Eränen; Heini Saloniemi; J. Hintsala; Ismo Luusua

doi:10.1238/Physica.Topical.101a00196

Concentration methods for the detection of trace elements in UPW

Simo Eränen^*, Heini Saloniemi, J. Hintsala, Ismo Luusua

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

The article describes methods, that can be used to concentrate ultra pure water for the detection of metallic trace impurities. A few possibilities for the concentration step are discussed. A new alternative, namely the vaporization on a silicon wafer combined with the vapor phase decomposition (VPD) technique is found to be a suitable candidate. The analysis of metallic impurities with the total reflection X-ray fluoresence (TXRF) and graphite furnace atomic absorption spectroscopy (GF-AAS) is shown to be extendable well into the sub-ppt regime.

Original language	English
Pages (from-to)	196-199
Journal	Physica Scripta
Volume	2002
Issue number	T101
DOIs	https://doi.org/10.1238/Physica.Topical.101a00196
Publication status	Published - 2002
MoE publication type	A1 Journal article-refereed
Event	19th Nordic Semiconductor Meeting, NSM19 - Copenhagen, Denmark Duration: 20 May 2001 → 23 May 2001

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10.1238/Physica.Topical.101a00196

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@article{b6fe4157e2fb4069ae0f92ec80e203d3,

title = "Concentration methods for the detection of trace elements in UPW",

abstract = "The article describes methods, that can be used to concentrate ultra pure water for the detection of metallic trace impurities. A few possibilities for the concentration step are discussed. A new alternative, namely the vaporization on a silicon wafer combined with the vapor phase decomposition (VPD) technique is found to be a suitable candidate. The analysis of metallic impurities with the total reflection X-ray fluoresence (TXRF) and graphite furnace atomic absorption spectroscopy (GF-AAS) is shown to be extendable well into the sub-ppt regime.",

author = "Simo Er{\"a}nen and Heini Saloniemi and J. Hintsala and Ismo Luusua",

year = "2002",

doi = "10.1238/Physica.Topical.101a00196",

language = "English",

volume = "2002",

pages = "196--199",

journal = "Physica Scripta",

issn = "0281-1847",

publisher = "Addison-Wesley",

number = "T101",

note = "19th Nordic Semiconductor Meeting, NSM19<br/>, NSM19 ; Conference date: 20-05-2001 Through 23-05-2001",

}

TY - JOUR

T1 - Concentration methods for the detection of trace elements in UPW

AU - Eränen, Simo

AU - Saloniemi, Heini

AU - Hintsala, J.

AU - Luusua, Ismo

PY - 2002

Y1 - 2002

N2 - The article describes methods, that can be used to concentrate ultra pure water for the detection of metallic trace impurities. A few possibilities for the concentration step are discussed. A new alternative, namely the vaporization on a silicon wafer combined with the vapor phase decomposition (VPD) technique is found to be a suitable candidate. The analysis of metallic impurities with the total reflection X-ray fluoresence (TXRF) and graphite furnace atomic absorption spectroscopy (GF-AAS) is shown to be extendable well into the sub-ppt regime.

AB - The article describes methods, that can be used to concentrate ultra pure water for the detection of metallic trace impurities. A few possibilities for the concentration step are discussed. A new alternative, namely the vaporization on a silicon wafer combined with the vapor phase decomposition (VPD) technique is found to be a suitable candidate. The analysis of metallic impurities with the total reflection X-ray fluoresence (TXRF) and graphite furnace atomic absorption spectroscopy (GF-AAS) is shown to be extendable well into the sub-ppt regime.

U2 - 10.1238/Physica.Topical.101a00196

DO - 10.1238/Physica.Topical.101a00196

M3 - Article

SN - 0281-1847

VL - 2002

SP - 196

EP - 199

JO - Physica Scripta

JF - Physica Scripta

IS - T101

T2 - 19th Nordic Semiconductor Meeting, NSM19<br/>

Y2 - 20 May 2001 through 23 May 2001

ER -

Concentration methods for the detection of trace elements in UPW

Abstract

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