Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Oili M.E. Ylivaara, Jihong Yim, Markku Ylilammi, Mikko Utriainen, Riikka, L. Puurunen

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 27 Jun 2019
    MoE publication typeNot Eligible
    EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
    Duration: 24 Jun 201928 Jun 2019
    https://www.eurocvd-balticald2019.lu

    Conference

    ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
    CountryLuxembourg
    Period24/06/1928/06/19
    Internet address

    Cite this

    Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M., & Puurunen, R. L. (2019). Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
    Ylivaara, Oili M.E. ; Yim, Jihong ; Ylilammi, Markku ; Utriainen, Mikko ; Puurunen, Riikka, L. / Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
    @conference{f5e061f92c1a468cb4c58a316107ab88,
    title = "Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures",
    author = "Ylivaara, {Oili M.E.} and Jihong Yim and Markku Ylilammi and Mikko Utriainen and Puurunen, {Riikka, L.}",
    year = "2019",
    month = "6",
    day = "27",
    language = "English",
    note = "Joint EuroCVD 22 - Baltic ALD 16 conference 2019 ; Conference date: 24-06-2019 Through 28-06-2019",
    url = "https://www.eurocvd-balticald2019.lu",

    }

    Ylivaara, OME, Yim, J, Ylilammi, M, Utriainen, M & Puurunen, RL 2019, 'Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures', Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg, 24/06/19 - 28/06/19.

    Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. / Ylivaara, Oili M.E.; Yim, Jihong; Ylilammi, Markku; Utriainen, Mikko; Puurunen, Riikka, L.

    2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    TY - CONF

    T1 - Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

    AU - Ylivaara, Oili M.E.

    AU - Yim, Jihong

    AU - Ylilammi, Markku

    AU - Utriainen, Mikko

    AU - Puurunen, Riikka, L.

    PY - 2019/6/27

    Y1 - 2019/6/27

    UR - https://www.eurocvd-balticald2019.lu

    M3 - Conference Poster

    ER -

    Ylivaara OME, Yim J, Ylilammi M, Utriainen M, Puurunen RL. Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. 2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.