Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Oili M.E. Ylivaara, Jihong Yim, Markku Ylilammi, Mikko Utriainen, Riikka, L. Puurunen

Research output: Contribution to conferenceConference PosterScientificpeer-review

Original languageEnglish
Publication statusPublished - 27 Jun 2019
MoE publication typeNot Eligible
EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
Duration: 24 Jun 201928 Jun 2019
https://www.eurocvd-balticald2019.lu

Conference

ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
CountryLuxembourg
Period24/06/1928/06/19
Internet address

Cite this

Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M., & Puurunen, R. L. (2019). Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
Ylivaara, Oili M.E. ; Yim, Jihong ; Ylilammi, Markku ; Utriainen, Mikko ; Puurunen, Riikka, L. / Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
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title = "Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures",
author = "Ylivaara, {Oili M.E.} and Jihong Yim and Markku Ylilammi and Mikko Utriainen and Puurunen, {Riikka, L.}",
year = "2019",
month = "6",
day = "27",
language = "English",
note = "Joint EuroCVD 22 - Baltic ALD 16 conference 2019 ; Conference date: 24-06-2019 Through 28-06-2019",
url = "https://www.eurocvd-balticald2019.lu",

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Ylivaara, OME, Yim, J, Ylilammi, M, Utriainen, M & Puurunen, RL 2019, 'Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures' Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg, 24/06/19 - 28/06/19, .

Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. / Ylivaara, Oili M.E.; Yim, Jihong; Ylilammi, Markku; Utriainen, Mikko; Puurunen, Riikka, L.

2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.

Research output: Contribution to conferenceConference PosterScientificpeer-review

TY - CONF

T1 - Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

AU - Ylivaara, Oili M.E.

AU - Yim, Jihong

AU - Ylilammi, Markku

AU - Utriainen, Mikko

AU - Puurunen, Riikka, L.

PY - 2019/6/27

Y1 - 2019/6/27

UR - https://www.eurocvd-balticald2019.lu

M3 - Conference Poster

ER -

Ylivaara OME, Yim J, Ylilammi M, Utriainen M, Puurunen RL. Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures. 2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.