Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

G. Feng; Kestutis Grigoras; Sanna Arpiainen; S. Gorelick; Riikka Puurunen

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

G. Feng, Kestutis Grigoras, Sanna Arpiainen, S. Gorelick, Riikka Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2014
Event	14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14

Conference

Conference	14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated title	ALD 2014
Country/Territory	Japan
City	Kyoto
Period	15/06/14 → 18/06/14

Cite this

@conference{afffb76570cd4b128597d42bcb8cf315,

title = "Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures",

author = "G. Feng and Kestutis Grigoras and Sanna Arpiainen and S. Gorelick and Riikka Puurunen",

note = "CA2: BA1114 CA2: BA1112 Project code: 73742; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",

year = "2014",

language = "English",

}

TY - CONF

T1 - Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

AU - Feng, G.

AU - Grigoras, Kestutis

AU - Arpiainen, Sanna

AU - Gorelick, S.

AU - Puurunen, Riikka

N1 - Conference code: 14

PY - 2014

Y1 - 2014

M3 - Conference Abstract

T2 - 14th International Conference on Atomic Layer Deposition, ALD 2014

Y2 - 15 June 2014 through 18 June 2014

ER -