Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

G. Feng, Kestutis Grigoras, Sanna Arpiainen, S. Gorelick, Riikka Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this

Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S., & Puurunen, R. (2014). Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
Feng, G. ; Grigoras, Kestutis ; Arpiainen, Sanna ; Gorelick, S. ; Puurunen, Riikka. / Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
@conference{afffb76570cd4b128597d42bcb8cf315,
title = "Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures",
author = "G. Feng and Kestutis Grigoras and Sanna Arpiainen and S. Gorelick and Riikka Puurunen",
note = "CA2: BA1114 CA2: BA1112 Project code: 73742; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",
year = "2014",
language = "English",

}

Feng, G, Grigoras, K, Arpiainen, S, Gorelick, S & Puurunen, R 2014, 'Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures' 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 - 18/06/14, .

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures. / Feng, G.; Grigoras, Kestutis; Arpiainen, Sanna; Gorelick, S.; Puurunen, Riikka.

2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.

Research output: Contribution to conferenceConference AbstractScientific

TY - CONF

T1 - Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

AU - Feng, G.

AU - Grigoras, Kestutis

AU - Arpiainen, Sanna

AU - Gorelick, S.

AU - Puurunen, Riikka

N1 - CA2: BA1114 CA2: BA1112 Project code: 73742

PY - 2014

Y1 - 2014

M3 - Conference Abstract

ER -

Feng G, Grigoras K, Arpiainen S, Gorelick S, Puurunen R. Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures. 2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.