Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

G. Feng, Kestutis Grigoras, Sanna Arpiainen, S. Gorelick, Riikka Puurunen

    Research output: Contribution to conferenceConference AbstractScientific

    Original languageEnglish
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

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