INIS
layers
100%
modeling
100%
deposition
100%
aspect ratio
26%
surfaces
15%
thickness
15%
applications
10%
reviews
10%
coatings
10%
simulation
5%
comparative evaluations
5%
levels
5%
energy
5%
plasma
5%
substrates
5%
experimental data
5%
growth
5%
transport
5%
chemistry
5%
thin films
5%
ozone
5%
gases
5%
solids
5%
nanostructures
5%
deposits
5%
holes
5%
probability
5%
microelectronics
5%
nanotechnology
5%
Engineering
Conformality
100%
Atomic Layer Deposition
100%
Deposition Process
41%
Aspect Ratio
17%
Conformal Coating
11%
High Aspect Ratio
11%
Reactant
5%
Experimental Result
5%
Special Attention
5%
Energy Technology
5%
Nanostructured Surface
5%
Microelectronics
5%
Thin Films
5%
Starting Point
5%
Sticking Probability
5%
Keyphrases
Characterization Approaches
5%
Self-limiting Reaction
5%