Keyphrases
3D Substrate
5%
Actual Application
5%
Aspect Ratio
17%
Atomic Layer Deposition
100%
Characterization Approaches
5%
Coatability
5%
Conformal Coating
11%
Conformality
100%
Cylindrical Hole
5%
Deposit Thickness
11%
Deposition Current
100%
Energy Technology
5%
Exposure Probability
5%
Gas Transport
5%
Gaseous Reactants
5%
Growth Form
5%
High Aspect Ratio Structure
11%
Knowledge Level
5%
Microelectronics
5%
Modeling Approach
5%
Nanostructured Surfaces
5%
Nanotechnology Applications
5%
Plasma Enhanced
5%
Reference Structure
5%
Self-limiting Reaction
5%
Solid Surface
5%
Sticking Probability
5%
Submonolayer
5%
Surface Chemistry
5%
Thermal Plasma
5%
Thickness Profile
11%
Transport Regime
5%
INIS
applications
10%
aspect ratio
26%
chemistry
5%
coatings
10%
comparative evaluations
5%
deposition
100%
deposits
5%
energy
5%
experimental data
5%
gases
5%
growth
5%
holes
5%
layers
100%
levels
5%
microelectronics
5%
modeling
100%
nanostructures
5%
nanotechnology
5%
ozone
5%
plasma
5%
probability
5%
reviews
10%
simulation
5%
solids
5%
substrates
5%
surfaces
15%
thickness
15%
thin films
5%
transport
5%
Engineering
Aspect Ratio
17%
Atomic Layer Deposition
100%
Conformal Coating
11%
Conformality
100%
Deposition Process
41%
Energy Technology
5%
Experimental Result
5%
High Aspect Ratio
11%
Microelectronics
5%
Nanostructured Surface
5%
Reactant
5%
Special Attention
5%
Starting Point
5%
Sticking Probability
5%
Thin Films
5%
Material Science
Surface (Surface Science)
100%
Thin Films
33%