Conformality of TMA/H2O and TMA/O3 processes evaluated using lateral high aspect ratio structures

Sakari Lepikko, Oili M.E. Ylivaara, Jihong Yim, Emma Verkama, Mikko Utriainen, Riikka, L. Puurunen, Robin H.A. Ras

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Fingerprint

Dive into the research topics of 'Conformality of TMA/H2O and TMA/O3 processes evaluated using lateral high aspect ratio structures'. Together they form a unique fingerprint.

INIS

Engineering

Keyphrases

Chemical Engineering