Conformality of TMA/H2O and TMA/O3 processes evaluated using lateral high aspect ratio structures

Sakari Lepikko, Oili M.E. Ylivaara, Jihong Yim, Emma Verkama, Mikko Utriainen, Riikka, L. Puurunen, Robin H.A. Ras

Research output: Contribution to conferenceConference PosterScientificpeer-review

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Physics & Astronomy