Consolidation of nanoimprinting for production

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationDigest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008
    Place of PublicationTokyo
    PublisherJapan Society of Applied Physics
    Number of pages2
    ISBN (Print)4-9902472-6-4
    Publication statusPublished - 2008
    MoE publication typeNot Eligible

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