Original language | English |
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Title of host publication | Digest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008 |
Place of Publication | Tokyo |
Publisher | Japan Society of Applied Physics |
Number of pages | 2 |
ISBN (Print) | 4-9902472-6-4 |
Publication status | Published - 2008 |
MoE publication type | Not Eligible |
Consolidation of nanoimprinting for production
Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific