Consolidation of nanoimprinting for production

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationDigest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008
    Place of PublicationTokyo
    PublisherJapan Society of Applied Physics
    Number of pages2
    ISBN (Print)4-9902472-6-4
    Publication statusPublished - 2008
    MoE publication typeNot Eligible

    Cite this

    Ahopelto, J. (2008). Consolidation of nanoimprinting for production. In Digest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008 Japan Society of Applied Physics.