Consolidation of nanoimprinting for production

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Digest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008
Place of Publication	Tokyo
Publisher	Japan Society of Applied Physics
Number of pages	2
ISBN (Print)	4-9902472-6-4
Publication status	Published - 2008
MoE publication type	Not Eligible

Cite this

@inbook{42db4ec17d6f4ec7b9163b67fb88e1d2,

title = "Consolidation of nanoimprinting for production",

author = "Jouni Ahopelto",

year = "2008",

language = "English",

isbn = "4-9902472-6-4",

booktitle = "Digest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008",

publisher = "Japan Society of Applied Physics",

address = "Japan",

}