Contact resistivity of silicon/silicide structures formed by thin film reactions

Manuela Finetti, S. Guerri, Piero Negrini, Andrea Scorzoni, Ilkka Suni

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

Abstract

Contact resistance measurements were carried out on n+ -Si/Pd2Si, n+ -Si/NiSi, n+ -Si/TiSi2, p+ -Si/Pd2Si, p+ -Si/NiSi and p+ -Si/TiSi2 structures using fourterminal resistor test patterns. Parasitic effects due to lateral current crowding at the entrance of the contact were taken into account in an accurate interpretation of the experimental results. The effect of silicide side-walls within the silicon is discussed and corrections for this effect are presented. For comparison, data obtained on test patterns conforming to the standard transmission line model are reported. Finally, the active dopant concentration profiles near the n+ -SiTiSi2, n+ -SiPd2Si and p+ -SiTiSi2 interfaces were measured in order to derive the theoretical values of the contact resistivity and to compare these values with the experimental results.

Original languageEnglish
Pages (from-to)37 - 45
Number of pages9
JournalThin Solid Films
Volume130
Issue number1-2
DOIs
Publication statusPublished - 1985
MoE publication typeNot Eligible

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