Control of ion-exchanged waveguide profiles with Ag thin-film sources

Ari Tervonen, Seppo Honkanen, Matti Leppihalme

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)

Abstract

Fabrication of optical ion‐exchanged glass waveguides by using thin‐film silver ion sources is studied with reference to the use of salt‐melt sources.
Since the amount of silver in a thin‐film source is limited, the process is source controlled, and it is shown that temperature and time as controlling parameters in the process can be replaced by source dimensions. Channel waveguide depth profiles are calculated.
When contact film over patterned silver‐film‐stripe sources is used, silver can be used totally, which results in good uniformity in waveguide depth.
Original languageEnglish
Pages (from-to)759-763
JournalJournal of Applied Physics
Volume62
Issue number3
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

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waveguides
thin films
profiles
silver
ions
ion sources
fabrication
glass
temperature

Cite this

Tervonen, Ari ; Honkanen, Seppo ; Leppihalme, Matti. / Control of ion-exchanged waveguide profiles with Ag thin-film sources. In: Journal of Applied Physics. 1987 ; Vol. 62, No. 3. pp. 759-763.
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Control of ion-exchanged waveguide profiles with Ag thin-film sources. / Tervonen, Ari; Honkanen, Seppo; Leppihalme, Matti.

In: Journal of Applied Physics, Vol. 62, No. 3, 1987, p. 759-763.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Control of ion-exchanged waveguide profiles with Ag thin-film sources

AU - Tervonen, Ari

AU - Honkanen, Seppo

AU - Leppihalme, Matti

PY - 1987

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N2 - Fabrication of optical ion‐exchanged glass waveguides by using thin‐film silver ion sources is studied with reference to the use of salt‐melt sources. Since the amount of silver in a thin‐film source is limited, the process is source controlled, and it is shown that temperature and time as controlling parameters in the process can be replaced by source dimensions. Channel waveguide depth profiles are calculated. When contact film over patterned silver‐film‐stripe sources is used, silver can be used totally, which results in good uniformity in waveguide depth.

AB - Fabrication of optical ion‐exchanged glass waveguides by using thin‐film silver ion sources is studied with reference to the use of salt‐melt sources. Since the amount of silver in a thin‐film source is limited, the process is source controlled, and it is shown that temperature and time as controlling parameters in the process can be replaced by source dimensions. Channel waveguide depth profiles are calculated. When contact film over patterned silver‐film‐stripe sources is used, silver can be used totally, which results in good uniformity in waveguide depth.

U2 - 10.1063/1.339729

DO - 10.1063/1.339729

M3 - Article

VL - 62

SP - 759

EP - 763

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

ER -